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@PHDTHESIS{Xu:828408,
author = {Xu, Chencheng},
title = {{I}n situ studies of the growth and oxidation of complex
metal oxides by pulsed laser deposition},
volume = {140},
school = {RWTH Aachen},
type = {Dr.},
address = {Jülich},
publisher = {Forschungszentrum Jülich GmbH Zentralbibliothek, Verlag},
reportid = {FZJ-2017-02369},
isbn = {978-3-95806-204-7},
series = {Schriften des Forschungszentrums Jülich. Reihe
Schlüsseltechnologien / Key Technologies},
pages = {IV, 159 S.},
year = {2017},
note = {RWTH Aachen, Diss., 2016},
abstract = {Pulsed Laser Deposition (PLD) is a versatile deposition
technique for complex metal oxide thin films and
heterostructures. Without sophisticated parameter
engineering, a stoichiometric transfer between target and
substrate can take place in a large pressure range of
different gas ambient. As a result, PLD is widely applied in
many research laboratories. However, the basic processes
during PLD growth are not well understood. Therefore most of
the research groups only carry out parameter optimization
for PLD empirically. Although the thin film properties can
be enhanced by empirical optimization of growth parameters,
the exact correlation between PLD growth process and thin
film property is hardly known. A better understanding in the
correlation between PLD growth and thin film properties is
gaining arising attention with its increasing importance for
different complex metal oxide based electronics nowadays.
The aspects to be investigated are different in various
material systems. The first example is the Resistive Random
Access Memories (ReRAM) based on complex metal oxides, e.g.
SrTiO$_{3}$ (STO) thin films, where the defects like cation
vacancies in thin oxide films play a crucial role for the
switching behavior. Only by understanding the defect
formation process during the PLD process a rational design
of defects in the thin film could be possible. The
$\textit{in-situ}$ studies on the defect formation process
during STO thin film growth are thus necessary. The second
example is the conductive interface between two band
insulators, e.g. LaAlO$_{3}$ (LAO) and STO. Since its
discovery one decade ago, the formation process of the
conductive interface is not well understood. To understand
the physical mechanism behind the conductive interface
formation, it is of pivotal importance to learn when the
formation takes place. Furthermore, the conductivity of
LAO/STO heterostructures are significantly influenced by the
defects like oxygen vacancies, which can be
incorporated/eliminated both by growth and post-annealing
process. So the $\textit{in-situ}$ study on the conductive
interface formation and the study on the oxygen vacancy
incorporation/elimination process during the growth and
annealing process are needed. In this work the
$\textit{in-situ}$ study on the defect formation process
during STO homoepitaxy is carried out. The cation
non-stoichiometries in STO thin films are introduced by the
preferential scattering process during laser plume
propagation. STO thin films with cation non-stoichiometry
remains at the early growth stage within 2D growth mode. The
defects are in this growth stage point defects inhibiting
surface diffusion through surface strain. The cation
non-stoichiometry leads further to the formation of extended
defects as growth proceeds and the growth mode is changed.
As an example, the Sr rich STO exhibits firstly 2D growth
with subsequent surface termination change from TiO$_{2}$ to
SrO at low film thickness, whereas the further growth
establishes anti-phase boundaries and lead to 3D island
growth. The conductive interface formation process between
LAO and STO is studied $\textit{in-situ}$ and
$\textit{real-time}$ with Oblique Incidence Reflectance
Difference technique (OIRD). In addition, the incorporation
and elimination processes of oxygen vacancies in LAO/STO
heterostructures are investigated as well. It is observed
from the growth process that the first 3 unit cells (u.c.)
LAO differ from the rest of LAO unit cells, indicating the
electronic transfer happens at 3 u.c. and does not influence
the first 3 u.c. LAO. The incorporation of oxygen vacancies
into the STO takes place during the PLD growth of LAO, while
the elimination of oxygen vacancies in STO is optimal at the
growth temperature and pressure. The main reason for the
incorporation of oxygen vacancies in STO is the impinging
particles with high kinetic energy.},
cin = {PGI-7},
cid = {I:(DE-Juel1)PGI-7-20110106},
pnm = {899 - ohne Topic (POF3-899)},
pid = {G:(DE-HGF)POF3-899},
typ = {PUB:(DE-HGF)3 / PUB:(DE-HGF)11},
urn = {urn:nbn:de:0001-2017080808},
url = {https://juser.fz-juelich.de/record/828408},
}