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024 7 _ |a 10.1063/1.4984117
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024 7 _ |a 0148-6349
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024 7 _ |a 1089-7550
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037 _ _ |a FZJ-2017-03896
082 _ _ |a 530
100 1 _ |a Schulte-Braucks, Christian
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245 _ _ |a Schottky barrier tuning via dopant segregation in NiGeSn-GeSn contacts
260 _ _ |a Melville, NY
|c 2017
|b American Inst. of Physics
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520 _ _ |a We present a comprehensive study on the formation and tuning of the Schottky barrier of NiGeSn metallic alloys on Ge1-xSnx semiconductors. First, the Ni metallization of GeSn is investigated for a wide range of Sn contents (x = 0–0.125). Structural analysis reveals the existence of different poly-crystalline NiGeSn and Ni3(GeSn)5 phases depending on the Sn content. Electrical measurements confirm a low NiGeSn sheet resistance of 12 Ω/□ almost independent of the Sn content. We extracted from Schottky barrier height measurements in NiGeSn/GeSn/NiGeSn metal-semiconductor-metal diodes Schottky barriers for the holes below 0.15 eV. They decrease with the Sn content, thereby confirming NiGeSn as an ideal metal alloy for p-type contacts. Dopant segregation for both p- and n-type dopants is investigated as a technique to effectively modify the Schottky barrier of NiGeSn/GeSn contacts. Secondary ion mass spectroscopy is employed to analyze dopant segregation and reveal its dependence on both the Sn content and biaxial layer strain.
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700 1 _ |a Glass, Stefan
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700 1 _ |a von den Driesch, Nils
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700 1 _ |a Mussler, Gregor
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700 1 _ |a Breuer, Uwe
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700 1 _ |a Hartmann, Jean-Michel
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700 1 _ |a Zaumseil, Peter
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700 1 _ |a Schröder, Thomas
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700 1 _ |a Zhao, Qing-Tai
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700 1 _ |a Mantl, Siegfried
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700 1 _ |a Buca, Dan
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773 _ _ |a 10.1063/1.4984117
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856 4 _ |y Published on 2017-05-31. Available in OpenAccess from 2018-05-31.
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