TY  - JOUR
AU  - Chen, Chunguang
AU  - Eichel, Rüdiger-A.
AU  - Notten, Peter H. L.
TI  - Metal-organic chemical vapor deposition enabling all-solid-state Li-ion microbatteries: A short review
JO  - Journal of electroceramics
VL  - 38
IS  - 2-4
SN  - 1573-8663
CY  - Dordrecht [u.a.]
PB  - Springer Science + Business Media B.V
M1  - FZJ-2017-04314
SP  - 230-247
PY  - 2017
AB  - For powering small-sized electronic devices, all-solid-state Li-ion batteries are the most promising candidates due to its safety and allowing miniaturization. Thin film deposition methods can be used for building new all-solid-state architectures. Well-known deposition methods are sputter deposition, pulsed laser deposition, sol-gel deposition, atomic layer deposition, etc. This review summarizes thin film storage materials deposited by metal-organic chemical vapor deposition (MOCVD) for all-solid-state Li-ion batteries. The deposition parameters strongly influence the quality of the films, such as surface morphology, composition, electrochemical stability and cycling performance. Some materials have been successfully deposited by MOCVD into 3D–structured substrates, revealing conformal, homogeneous and high performance battery properties.
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000415362700013
DO  - DOI:10.1007/s10832-017-0090-1
UR  - https://juser.fz-juelich.de/record/834339
ER  -