%0 Thesis
%A Karimzadah, Soraya
%T Atomic layer deposition of Al2O3 towards the in-situ fabrication of gate stacks on GaAs substrates
%I Siegen
%V MS
%M FZJ-2017-05567
%P 85p.
%D 2017
%Z Siegen, Masterarbeit, 2017
%F PUB:(DE-HGF)19
%9 Master Thesis
%U https://juser.fz-juelich.de/record/836446