000836904 001__ 836904
000836904 005__ 20240712084521.0
000836904 0247_ $$2doi$$a10.1109/JPHOTOV.2017.2719866
000836904 0247_ $$2WOS$$aWOS:000408160700017
000836904 0247_ $$2altmetric$$aaltmetric:24159113
000836904 037__ $$aFZJ-2017-05936
000836904 041__ $$aEnglish
000836904 082__ $$a530
000836904 1001_ $$0P:(DE-Juel1)167158$$aKim, Do Yun$$b0$$eCorresponding author$$ufzj
000836904 245__ $$aSelective Dry Etching of p-Type Si Films for Photolithography Processing of Interdigitated Back Contact Silicon Heterojunction Solar Cells
000836904 260__ $$aNew York, NY$$bIEEE$$c2017
000836904 3367_ $$2DRIVER$$aarticle
000836904 3367_ $$2DataCite$$aOutput Types/Journal article
000836904 3367_ $$0PUB:(DE-HGF)16$$2PUB:(DE-HGF)$$aJournal Article$$bjournal$$mjournal$$s1503302072_20144
000836904 3367_ $$2BibTeX$$aARTICLE
000836904 3367_ $$2ORCID$$aJOURNAL_ARTICLE
000836904 3367_ $$00$$2EndNote$$aJournal Article
000836904 520__ $$aHighly doped p-type Si thin films are hardly etched by alkaline etchants unlike i- and n-type Si films. In addition, the use of a HNO3/HF/H2O mixture to etch p-type Si films can lead to inhomogeneous etching of p-type Si films and consequently result in excessive surface roughness and inferior surface passivation. For these reasons, we have implemented a dry etching method to selectively pattern p-type Si films for interdigitated back contact (IBC) silicon heterojunction (SHJ) solar cells using a SiOx masking layer. In this way, the underlying passivation layer and the Si surfaces can be undamaged. In this study, the etch rates of all Si films that make up IBC-SHJ solar cells have been investigated in order to obtain high etch selectivity and establish proper patterning steps. Furthermore, we have fabricated IBC-SHJ solar cells on planar wafers by using dry and wet patterning methods developed in this study. As a result, a conversion efficiency of 15.7% is obtained with Voc of 682 mV, Jsc of 33.8 mA/cm2, and FF of 0.68.
000836904 536__ $$0G:(DE-HGF)POF3-121$$a121 - Solar cells of the next generation (POF3-121)$$cPOF3-121$$fPOF III$$x0
000836904 536__ $$0G:(DE-Juel1)HITEC-20170406$$aHITEC - Helmholtz Interdisciplinary Doctoral Training in Energy and Climate Research (HITEC) (HITEC-20170406)$$cHITEC-20170406$$x1
000836904 588__ $$aDataset connected to CrossRef
000836904 7001_ $$0P:(DE-Juel1)130795$$aLentz, Florian$$b1$$ufzj
000836904 7001_ $$0P:(DE-Juel1)168198$$aLiu, Yong$$b2$$ufzj
000836904 7001_ $$0P:(DE-Juel1)164370$$aSingh, Aryak$$b3$$ufzj
000836904 7001_ $$0P:(DE-Juel1)162140$$aRichter, Alexei$$b4$$ufzj
000836904 7001_ $$0P:(DE-Juel1)162141$$aPomaska, Manuel$$b5$$ufzj
000836904 7001_ $$0P:(DE-Juel1)130263$$aLambertz, Andreas$$b6$$ufzj
000836904 7001_ $$0P:(DE-Juel1)130233$$aDing, Kaining$$b7$$ufzj
000836904 773__ $$0PERI:(DE-600)2585714-9$$a10.1109/JPHOTOV.2017.2719866$$gp. 1 - 6$$n5$$p1292 - 1297$$tIEEE journal of photovoltaics$$v7$$x2156-3381$$y2017
000836904 8564_ $$uhttps://juser.fz-juelich.de/record/836904/files/07981317.pdf$$yRestricted
000836904 8564_ $$uhttps://juser.fz-juelich.de/record/836904/files/07981317.gif?subformat=icon$$xicon$$yRestricted
000836904 8564_ $$uhttps://juser.fz-juelich.de/record/836904/files/07981317.jpg?subformat=icon-1440$$xicon-1440$$yRestricted
000836904 8564_ $$uhttps://juser.fz-juelich.de/record/836904/files/07981317.jpg?subformat=icon-180$$xicon-180$$yRestricted
000836904 8564_ $$uhttps://juser.fz-juelich.de/record/836904/files/07981317.jpg?subformat=icon-640$$xicon-640$$yRestricted
000836904 8564_ $$uhttps://juser.fz-juelich.de/record/836904/files/07981317.pdf?subformat=pdfa$$xpdfa$$yRestricted
000836904 909CO $$ooai:juser.fz-juelich.de:836904$$pVDB
000836904 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)167158$$aForschungszentrum Jülich$$b0$$kFZJ
000836904 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)130795$$aForschungszentrum Jülich$$b1$$kFZJ
000836904 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)168198$$aForschungszentrum Jülich$$b2$$kFZJ
000836904 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)164370$$aForschungszentrum Jülich$$b3$$kFZJ
000836904 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)162140$$aForschungszentrum Jülich$$b4$$kFZJ
000836904 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)162141$$aForschungszentrum Jülich$$b5$$kFZJ
000836904 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)130263$$aForschungszentrum Jülich$$b6$$kFZJ
000836904 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)130233$$aForschungszentrum Jülich$$b7$$kFZJ
000836904 9131_ $$0G:(DE-HGF)POF3-121$$1G:(DE-HGF)POF3-120$$2G:(DE-HGF)POF3-100$$3G:(DE-HGF)POF3$$4G:(DE-HGF)POF$$aDE-HGF$$bEnergie$$lErneuerbare Energien$$vSolar cells of the next generation$$x0
000836904 9141_ $$y2017
000836904 915__ $$0StatID:(DE-HGF)0100$$2StatID$$aJCR$$bIEEE J PHOTOVOLT : 2015
000836904 915__ $$0StatID:(DE-HGF)0200$$2StatID$$aDBCoverage$$bSCOPUS
000836904 915__ $$0StatID:(DE-HGF)0199$$2StatID$$aDBCoverage$$bThomson Reuters Master Journal List
000836904 915__ $$0StatID:(DE-HGF)0111$$2StatID$$aWoS$$bScience Citation Index Expanded
000836904 915__ $$0StatID:(DE-HGF)0150$$2StatID$$aDBCoverage$$bWeb of Science Core Collection
000836904 915__ $$0StatID:(DE-HGF)1150$$2StatID$$aDBCoverage$$bCurrent Contents - Physical, Chemical and Earth Sciences
000836904 915__ $$0StatID:(DE-HGF)1160$$2StatID$$aDBCoverage$$bCurrent Contents - Engineering, Computing and Technology
000836904 915__ $$0StatID:(DE-HGF)9900$$2StatID$$aIF < 5
000836904 920__ $$lyes
000836904 9201_ $$0I:(DE-Juel1)IEK-5-20101013$$kIEK-5$$lPhotovoltaik$$x0
000836904 980__ $$ajournal
000836904 980__ $$aVDB
000836904 980__ $$aI:(DE-Juel1)IEK-5-20101013
000836904 980__ $$aUNRESTRICTED
000836904 981__ $$aI:(DE-Juel1)IMD-3-20101013