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@ARTICLE{Engels:837636,
      author       = {Engels, J. and Griesche, D. and Waser, R. and Schneller,
                      T.},
      title        = {{T}hin film proton conducting membranes for micro-solid
                      oxide fuel cells by chemical solution deposition},
      journal      = {Thin solid films},
      volume       = {636},
      issn         = {0040-6090},
      address      = {Amsterdam [u.a.]},
      publisher    = {Elsevier},
      reportid     = {FZJ-2017-06515},
      pages        = {446 - 457},
      year         = {2017},
      abstract     = {Micro solid oxide fuel cells (μ-SOFC) were manufactured
                      with perovskite type proton conductors on silicon substrates
                      and with structured Pt-grid electrodes. In order to
                      miniaturize the μ-SOFCs and to shorten the ion path through
                      the electrolyte, the thin film proton conductors were only ~
                      510 nm thick. The thin films consist of 10 $mol\%$
                      yttrium-doped BaZrO3 (BZY10) and they were deposited by
                      means of chemical solution deposition (CSD). CSD was
                      applied, because it represents a highly attractive
                      fabrication method, considering the relatively low
                      investment costs and flexibility with regard to
                      stoichiometry. The backsides of the μ-SOFCs on the
                      substrates were opened by wet chemical and plasma etching to
                      form the freestanding membranes. The completed μ-SOFCs
                      resist up to a temperature of 450 °C. Their electrical
                      properties, such as permittivity, and resistivity were
                      investigated. By means of electrochemical impedance
                      spectroscopy (EIS) in the temperature range of 100 °C to
                      450 °C, the resistivity properties and the activation
                      energies of the model μ-SOFC were studied with humid
                      hydrogen in nitrogen at the anode and different oxygen
                      partial pressures at the cathode. The results provide a
                      clear hint for a dominating protonic defect transport
                      mechanism in the electrolyte. In the 450 °C measurement,
                      the model μ-SOFCs reached an open circuit voltage of 600 mV
                      with $100\%$ oxygen at the cathode and humid hydrogen in
                      nitrogen at the anode.},
      cin          = {PGI-7 / JARA-FIT / IEK-4},
      ddc          = {070},
      cid          = {I:(DE-Juel1)PGI-7-20110106 / $I:(DE-82)080009_20140620$ /
                      I:(DE-Juel1)IEK-4-20101013},
      pnm          = {524 - Controlling Collective States (POF3-524) / HITEC -
                      Helmholtz Interdisciplinary Doctoral Training in Energy and
                      Climate Research (HITEC) (HITEC-20170406)},
      pid          = {G:(DE-HGF)POF3-524 / G:(DE-Juel1)HITEC-20170406},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000408037800064},
      doi          = {10.1016/j.tsf.2017.06.038},
      url          = {https://juser.fz-juelich.de/record/837636},
}