000837648 001__ 837648
000837648 005__ 20210129231417.0
000837648 037__ $$aFZJ-2017-06526
000837648 1001_ $$0P:(DE-Juel1)165704$$aHardtdegen, Alexander$$b0$$ufzj
000837648 1112_ $$aEuropean Materials Research Meeting$$cWarsaw$$d2017-09-18 - 2017-09-22$$gEMRS$$wPoland
000837648 245__ $$aComparison of plasma-enhanced and thermal atomic layer deposited TiO2 for the integration into HfO2/TiO2-based resistive switching devices
000837648 260__ $$c2017
000837648 3367_ $$033$$2EndNote$$aConference Paper
000837648 3367_ $$2BibTeX$$aINPROCEEDINGS
000837648 3367_ $$2DRIVER$$aconferenceObject
000837648 3367_ $$2ORCID$$aCONFERENCE_POSTER
000837648 3367_ $$2DataCite$$aOutput Types/Conference Poster
000837648 3367_ $$0PUB:(DE-HGF)24$$2PUB:(DE-HGF)$$aPoster$$bposter$$mposter$$s1505398665_23764$$xOther
000837648 536__ $$0G:(DE-HGF)POF3-524$$a524 - Controlling Collective States (POF3-524)$$cPOF3-524$$fPOF III$$x0
000837648 7001_ $$0P:(DE-Juel1)156365$$aZhang, Hehe$$b1$$ufzj
000837648 7001_ $$0P:(DE-Juel1)130717$$aHoffmann-Eifert, Susanne$$b2$$ufzj
000837648 909CO $$ooai:juser.fz-juelich.de:837648$$pVDB
000837648 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)165704$$aForschungszentrum Jülich$$b0$$kFZJ
000837648 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)156365$$aForschungszentrum Jülich$$b1$$kFZJ
000837648 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)130717$$aForschungszentrum Jülich$$b2$$kFZJ
000837648 9131_ $$0G:(DE-HGF)POF3-524$$1G:(DE-HGF)POF3-520$$2G:(DE-HGF)POF3-500$$3G:(DE-HGF)POF3$$4G:(DE-HGF)POF$$aDE-HGF$$bKey Technologies$$lFuture Information Technology - Fundamentals, Novel Concepts and Energy Efficiency (FIT)$$vControlling Collective States$$x0
000837648 9141_ $$y2017
000837648 9201_ $$0I:(DE-Juel1)PGI-7-20110106$$kPGI-7$$lElektronische Materialien$$x0
000837648 9201_ $$0I:(DE-Juel1)PGI-10-20170113$$kPGI-10$$lJARA Institut Green IT$$x1
000837648 9201_ $$0I:(DE-82)080009_20140620$$kJARA-FIT$$lJARA-FIT$$x2
000837648 980__ $$aposter
000837648 980__ $$aVDB
000837648 980__ $$aI:(DE-Juel1)PGI-7-20110106
000837648 980__ $$aI:(DE-Juel1)PGI-10-20170113
000837648 980__ $$aI:(DE-82)080009_20140620
000837648 980__ $$aUNRESTRICTED