TY  - CONF
AU  - Hardtdegen, Alexander
AU  - Zhang, Hehe
AU  - Hoffmann-Eifert, Susanne
TI  - Comparison of plasma-enhanced and thermal atomic layer deposited TiO2 for the integration into HfO2/TiO2-based resistive switching devices
M1  - FZJ-2017-06526
PY  - 2017
T2  - European Materials Research Meeting
CY  - 18 Sep 2017 - 22 Sep 2017, Warsaw (Poland)
Y2  - 18 Sep 2017 - 22 Sep 2017
M2  - Warsaw, Poland
LB  - PUB:(DE-HGF)24
UR  - https://juser.fz-juelich.de/record/837648
ER  -