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@ARTICLE{Ma:838085,
      author       = {Ma, Changdong and Lu, Fei and Jin, Lei and Xu, Bo and Fan,
                      Ranran},
      title        = {{S}urface modification of single crystal {L}i{T}a{O}3 by
                      {H} and {H}e implantation},
      journal      = {Nuclear instruments $\&$ methods in physics research / B},
      volume       = {392},
      issn         = {0168-583X},
      address      = {Amsterdam [u.a.]},
      publisher    = {Elsevier},
      reportid     = {FZJ-2017-100008},
      pages        = {62 - 66},
      year         = {2017},
      abstract     = {Defects production and evolution in H and He ions
                      co-implanted LiTaO3 under different implantation order (H +
                      He and He + H) are investigated. Rutherford backscattering
                      spectrometry (RBS), infrared (IR) spectroscopy and
                      transmission electron microscopy (TEM) are used to study the
                      lattice damage, composition and structure change in the
                      buried damage region. Obvious differences of ions
                      aggregation mechanism are found in H and He implanted
                      LiTaO3. Blistering or splitting of LiTaO3 is more easily
                      achieved in the case where He is implanted first compared to
                      the reverses case. Significant damage enhancement and
                      micro-fractures are observed in samples with He preimplant.
                      The dispersed damage in H-first sample is due to the
                      destruction by He post-bombardment of H-clusters. This order
                      effect indicates the strong aggregation and trapping ability
                      of He ions and He bubbles. The effect of coimplantation
                      parameters on the cleaving of LiTaO3 is discussed},
      cin          = {ER-C-1},
      ddc          = {530},
      cid          = {I:(DE-Juel1)ER-C-1-20170209},
      pnm          = {143 - Controlling Configuration-Based Phenomena (POF3-143)},
      pid          = {G:(DE-HGF)POF3-143},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000398763500011},
      doi          = {10.1016/j.nimb.2016.12.012},
      url          = {https://juser.fz-juelich.de/record/838085},
}