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@ARTICLE{Gries:841856,
author = {Gries, U. N. and Schraknepper, H. and Skaja, K. and Gunkel,
F. and Hoffmann-Eifert, S. and Waser, R. and De Souza, R.
A.},
title = {{A} {SIMS} study of cation and anion diffusion in tantalum
oxide},
journal = {Physical chemistry, chemical physics},
volume = {20},
number = {2},
issn = {1463-9084},
address = {Cambridge},
publisher = {RSC Publ.},
reportid = {FZJ-2018-00154},
pages = {989 - 996},
year = {2018},
abstract = {Ion transport in ceramics of the low-temperature phase of
tantalum pentoxide, L-Ta2O5, was examined by means of
diffusion experiments and subsequent analysis of diffusion
profiles with time-of-flight secondary ion mass spectrometry
(ToF-SIMS). 18O/16O isotope anneals were used to investigate
oxygen diffusion, and oxygen tracer diffusion coefficients
were obtained for the temperature range of 623 ≤ T/K ≤
873 at an oxygen partial pressure of pO2 = 0.2 bar and for
the oxygen partial pressure range of 10−2 ≤ pO2/bar ≤
100 at a temperature of T = 723 K. Cation diffusion in Ta2O5
was probed by using chemically similar niobium as the
diffusant (in the absence of stable tantalum isotopes). Thin
films of Nb2O5 were deposited onto Ta2O5 ceramics; diffusion
anneals yielded niobium diffusion coefficients for the
temperature range of 1073 ≤ T/K ≤ 1223 at an oxygen
partial pressure of pO2 = 0.2 bar. Comparison of the
measured diffusion coefficients strongly suggests that
oxygen is many orders of magnitude more mobile than niobium
in L-Ta2O5 at these temperatures and at pO2 = 0.2 bar. The
electrical conductivity was also determined in the range 950
≤ T/K ≤ 1200 and 10−23 ≤ pO2/bar ≤ 10−2.
Considered together with the measured diffusion
coefficients, the conductivity data indicate that under
oxidising conditions conduction is due to oxygen ions above
T = 1090–1130 K and due to electron holes below this
temperature range. Point-defect models are presented that
are consistent with these transport data and with
conductivity data in the literature. They suggest that under
oxidising conditions oxygen interstitials are the majority
ionic charge carriers in L-Ta2O5. The implications for
resistive switching devices are discussed.},
cin = {PGI-7 / JARA-FIT},
ddc = {540},
cid = {I:(DE-Juel1)PGI-7-20110106 / $I:(DE-82)080009_20140620$},
pnm = {524 - Controlling Collective States (POF3-524)},
pid = {G:(DE-HGF)POF3-524},
typ = {PUB:(DE-HGF)16},
pubmed = {pmid:29234759},
UT = {WOS:000419219700029},
doi = {10.1039/C7CP07441G},
url = {https://juser.fz-juelich.de/record/841856},
}