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@TECHREPORT{Bnting:841926,
      author       = {Bünting, Aiko and Uhlenbruck, Sven},
      title        = {{V}erfahren zur {H}erstellung nanostrukturierter
                      {S}chichten},
      reportid     = {FZJ-2018-00213},
      year         = {2016},
      cin          = {IEK-1},
      cid          = {I:(DE-Juel1)IEK-1-20101013},
      pnm          = {899 - ohne Topic (POF3-899)},
      pid          = {G:(DE-HGF)POF3-899},
      typ          = {PUB:(DE-HGF)23},
      url          = {https://juser.fz-juelich.de/record/841926},
}