TY  - JOUR
AU  - MacArthur, Katherine
AU  - Brown, Hamish G.
AU  - Findlay, Scott D.
AU  - Allen, Leslie J.
TI  - Probing the effect of electron channelling on atomic resolution energy dispersive X-ray quantification
JO  - Ultramicroscopy
VL  - 182
SN  - 0304-3991
CY  - Amsterdam
PB  - Elsevier Science
M1  - FZJ-2018-00824
SP  - 264 - 275
PY  - 2017
AB  - Advances in microscope stability, aberration correction and detector design now make it readily possible to achieve atomic resolution energy dispersive X-ray mapping for dose resilient samples. These maps show impressive atomic-scale qualitative detail as to where the elements reside within a given sample. Unfortunately, while electron channelling is exploited to provide atomic resolution data, this very process makes the images rather more complex to interpret quantitatively than if no electron channelling occurred. Here we propose small sample tilt as a means for suppressing channelling and improving quantification of composition, whilst maintaining atomic-scale resolution. Only by knowing composition and thickness of the sample is it possible to determine the atomic configuration within each column. The effects of neighbouring atomic columns with differing composition and of residual channelling on our ability to extract exact column-by-column composition are also discussed.
LB  - PUB:(DE-HGF)16
C6  - pmid:28780142
UR  - <Go to ISI:>//WOS:000413436500034
DO  - DOI:10.1016/j.ultramic.2017.07.020
UR  - https://juser.fz-juelich.de/record/842613
ER  -