%0 Thesis
%A Zhang, Jing
%T Analysis of ferroelectric layers of doped HfO2
%I RWTH Aachen University
%V Masterarbeit
%M FZJ-2018-00877
%P p.53
%D 2017
%Z Masterarbeit, RWTH Aachen University, 2017
%F PUB:(DE-HGF)19
%9 Master Thesis
%U https://juser.fz-juelich.de/record/842670