TY  - THES
AU  - Zhang, Jing
TI  - Analysis of ferroelectric layers of doped HfO2
PB  - RWTH Aachen University
VL  - Masterarbeit
M1  - FZJ-2018-00877
SP  - p.53
PY  - 2017
N1  - Masterarbeit, RWTH Aachen University, 2017
LB  - PUB:(DE-HGF)19
UR  - https://juser.fz-juelich.de/record/842670
ER  -