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@PHDTHESIS{vondenDriesch:844060,
author = {von den Driesch, Nils},
title = {{E}pitaxy of group {IV} {S}i-{G}e-{S}n alloys for advanced
heterostructure light emitters},
volume = {163},
school = {RWTH Aachen},
type = {Dr.},
address = {Jülich},
publisher = {Forschungszentrum Jülich GmbH Zentralbibliothek, Verlag},
reportid = {FZJ-2018-01569},
isbn = {978-3-95806-300-6},
series = {Schriften des Forschungszentrums Jülich. Reihe
Schlüsseltechnologien / Key Technologies},
pages = {VIII, 149 S.},
year = {2018},
note = {RWTH Aachen, Diss., 2018},
abstract = {Over the last decades, silicon-based integrated circuits
underpinned information technology. To keep up with the
demand for faster and, becoming increasingly more relevant
nowadays, energy-efficient electronics, smart solutions
targeting power consumptionare required. Integration of
photonic components, e.g. for replacing part of copper
interconnects, could strongly reduce on-chip dissipation.
Prerequisite for efficient active optoelectronic devices,
however not available in group IV elements, is a direct
bandgap. Only recently though, a truly silicon-compatible
solution was demonstrated by tin-based group IV GeSn alloys,
which offer a direct bandgap for acubic lattice and Sn
concentrations above 9 $at.\%.$ Nevertheless, when moving
froman experimental direct bandgap demonstration towards
readily integrated light emitters, plenty of challenges have
to be overcome. In this work, some of the remaining key
aspects are investigated. $\textit{Reduced-pressure chemical
vapor deposition}$ on 200mm (Ge-buffered) Si wafers was used
to form the investigated Si-Ge-Sn alloys. GeSn layers with
subtitutionally incorporated Sn concentrations up to 14
at.\%, considerably exceeding the solid solubility limit of
1 at.\% Sn in Ge, were epitaxially grown to study growth
kinetics. The necessary strain relieve in GeSn binaries was
studied growing layers with thicknesses up to 1 μm, well
above the critical thickness for strain relaxation.
Influence of both, Sn incorporation and residual strain, on
the optical properties was probed using
temperature-dependent photoluminescence and reflection
spectroscopy. Mid infrared light emission was found at
wavelengths as long as 3.4 μm (0.37 eV) at room
temperature. Overall, the investigated GeSn material system
allows to cover a range up to about 2 μm (0.60 eV), making
these binaries also interesting for a multitude of chemical
and biological sensing applications. [...]},
cin = {PGI-9},
cid = {I:(DE-Juel1)PGI-9-20110106},
pnm = {521 - Controlling Electron Charge-Based Phenomena
(POF3-521)},
pid = {G:(DE-HGF)POF3-521},
typ = {PUB:(DE-HGF)3 / PUB:(DE-HGF)11},
urn = {urn:nbn:de:0001-2018050969},
url = {https://juser.fz-juelich.de/record/844060},
}