TY  - JOUR
AU  - Shiloh, Roy
AU  - Remez, Roei
AU  - Lu, Peng-Han
AU  - Jin, Lei
AU  - Lereah, Yossi
AU  - Tavabi, Amir H.
AU  - Dunin-Borkowski, Rafal
AU  - Arie, Ady
TI  - Spherical aberration correction in a scanning transmission electron microscope using a sculpted thin film
JO  - Ultramicroscopy
VL  - 189
SN  - 0304-3991
CY  - Amsterdam
PB  - Elsevier Science
M1  - FZJ-2018-02157
SP  - 46-53
PY  - 2018
AB  - Nearly eighty years ago, Scherzer showed that rotationally symmetric, charge-free, static electron lenses are limited by an unavoidable, positive spherical aberration. Following a long struggle, a major breakthrough in the spatial resolution of electron microscopes was reached two decades ago by abandoning the first of these conditions, with the successful development of multipole aberration correctors. Here, we use a refractive silicon nitride thin film to tackle the second of Scherzer's constraints and demonstrate an alternative method for correcting spherical aberration in a scanning transmission electron microscope. We reveal features in Si and Cu samples that cannot be resolved in an uncorrected microscope. Our thin film corrector can be implemented as an immediate low cost upgrade to existing electron microscopes without re-engineering of the electron column or complicated operation protocols and can be extended to the correction of additional aberrations.
LB  - PUB:(DE-HGF)16
C6  - pmid:29614394
UR  - <Go to ISI:>//WOS:000432868500004
DO  - DOI:10.1016/j.ultramic.2018.03.016
UR  - https://juser.fz-juelich.de/record/844781
ER  -