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@ARTICLE{Shiloh:844781,
      author       = {Shiloh, Roy and Remez, Roei and Lu, Peng-Han and Jin, Lei
                      and Lereah, Yossi and Tavabi, Amir H. and Dunin-Borkowski,
                      Rafal and Arie, Ady},
      title        = {{S}pherical aberration correction in a scanning
                      transmission electron microscope using a sculpted thin film},
      journal      = {Ultramicroscopy},
      volume       = {189},
      issn         = {0304-3991},
      address      = {Amsterdam},
      publisher    = {Elsevier Science},
      reportid     = {FZJ-2018-02157},
      pages        = {46-53},
      year         = {2018},
      abstract     = {Nearly eighty years ago, Scherzer showed that rotationally
                      symmetric, charge-free, static electron lenses are limited
                      by an unavoidable, positive spherical aberration. Following
                      a long struggle, a major breakthrough in the spatial
                      resolution of electron microscopes was reached two decades
                      ago by abandoning the first of these conditions, with the
                      successful development of multipole aberration correctors.
                      Here, we use a refractive silicon nitride thin film to
                      tackle the second of Scherzer's constraints and demonstrate
                      an alternative method for correcting spherical aberration in
                      a scanning transmission electron microscope. We reveal
                      features in Si and Cu samples that cannot be resolved in an
                      uncorrected microscope. Our thin film corrector can be
                      implemented as an immediate low cost upgrade to existing
                      electron microscopes without re-engineering of the electron
                      column or complicated operation protocols and can be
                      extended to the correction of additional aberrations.},
      cin          = {ER-C-1},
      ddc          = {570},
      cid          = {I:(DE-Juel1)ER-C-1-20170209},
      pnm          = {143 - Controlling Configuration-Based Phenomena (POF3-143)},
      pid          = {G:(DE-HGF)POF3-143},
      typ          = {PUB:(DE-HGF)16},
      pubmed       = {pmid:29614394},
      UT           = {WOS:000432868500004},
      doi          = {10.1016/j.ultramic.2018.03.016},
      url          = {https://juser.fz-juelich.de/record/844781},
}