%0 Conference Paper
%A Aussen, Stephan
%A Hardtdegen, Alexander
%A Heisig, Thomas
%A Bäumer, Christoph
%A Dittmann, Regina
%A Hoffmann-Eifert, Susanne
%T Hafnium oxide interface formation during ALD oxide growth on pure Hf films for resistive switches
%M FZJ-2018-02345
%D 2018
%B DPG Frühjahrstagung
%C 11 Mar 2018 - 16 Mar 2018, Berlin (Germany)
Y2 11 Mar 2018 - 16 Mar 2018
M2 Berlin, Germany
%F PUB:(DE-HGF)6
%9 Conference Presentation
%U https://juser.fz-juelich.de/record/845016