TY  - CONF
AU  - Aussen, Stephan
AU  - Hardtdegen, Alexander
AU  - Heisig, Thomas
AU  - Bäumer, Christoph
AU  - Dittmann, Regina
AU  - Hoffmann-Eifert, Susanne
TI  - Hafnium oxide interface formation during ALD oxide growth on pure Hf films for resistive switches
M1  - FZJ-2018-02345
PY  - 2018
T2  - DPG Frühjahrstagung
CY  - 11 Mar 2018 - 16 Mar 2018, Berlin (Germany)
Y2  - 11 Mar 2018 - 16 Mar 2018
M2  - Berlin, Germany
LB  - PUB:(DE-HGF)6
UR  - https://juser.fz-juelich.de/record/845016
ER  -