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@INPROCEEDINGS{Aussen:845016,
author = {Aussen, Stephan and Hardtdegen, Alexander and Heisig,
Thomas and Bäumer, Christoph and Dittmann, Regina and
Hoffmann-Eifert, Susanne},
title = {{H}afnium oxide interface formation during {ALD} oxide
growth on pure {H}f films for resistive switches},
reportid = {FZJ-2018-02345},
year = {2018},
month = {Mar},
date = {2018-03-11},
organization = {DPG Frühjahrstagung, Berlin
(Germany), 11 Mar 2018 - 16 Mar 2018},
subtyp = {Other},
cin = {PGI-7 / JARA-FIT},
cid = {I:(DE-Juel1)PGI-7-20110106 / $I:(DE-82)080009_20140620$},
pnm = {524 - Controlling Collective States (POF3-524)},
pid = {G:(DE-HGF)POF3-524},
typ = {PUB:(DE-HGF)6},
url = {https://juser.fz-juelich.de/record/845016},
}