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@ARTICLE{Khler:845320,
      author       = {Köhler, Malte and Pomaska, Manuel and Lentz, Florian and
                      Finger, Friedhelm and Rau, Uwe and Ding, Kaining},
      title        = {{W}et-{C}hemical {P}reparation of {S}ilicon {T}unnel
                      {O}xides for {T}ransparent {P}assivated {C}ontacts in
                      {C}rystalline {S}ilicon {S}olar {C}ells},
      journal      = {ACS applied materials $\&$ interfaces},
      volume       = {10},
      number       = {17},
      issn         = {1944-8252},
      address      = {Washington, DC},
      publisher    = {Soc.},
      reportid     = {FZJ-2018-02598},
      pages        = {14259–14263},
      year         = {2018},
      abstract     = {Transparent passivated contacts (TPCs) using a wide band
                      gap microcrystalline silicon carbide (μc-SiC:H(n)), silicon
                      tunnel oxide (SiO2) stack are an alternative to amorphous
                      silicon-based contacts for the front side of silicon
                      heterojunction solar cells. In a systematic study of the
                      μc-SiC:H(n)/SiO2/c-Si contact, we investigated selected
                      wet-chemical oxidation methods for the formation of
                      ultrathin SiO2, in order to passivate the silicon surface
                      while ensuring a low contact resistivity. By tuning the SiO2
                      properties, implied open-circuit voltages of 714 mV and
                      contact resistivities of 32 mΩ cm2 were achieved using
                      μc-SiC:H(n)/SiO2/c-Si as transparent passivated contacts.},
      cin          = {IEK-5},
      ddc          = {540},
      cid          = {I:(DE-Juel1)IEK-5-20101013},
      pnm          = {121 - Solar cells of the next generation (POF3-121)},
      pid          = {G:(DE-HGF)POF3-121},
      typ          = {PUB:(DE-HGF)16},
      pubmed       = {pmid:29664611},
      UT           = {WOS:000431723400004},
      doi          = {10.1021/acsami.8b02002},
      url          = {https://juser.fz-juelich.de/record/845320},
}