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@PHDTHESIS{Dai:845360,
author = {Dai, Yang},
title = {{T}ailoring the {E}lectronic {P}roperties of {E}pitaxial
{O}xide {F}ilms via {S}train for {SAW} and {N}euromorphic
{A}pplications},
volume = {169},
school = {Universität Köln},
type = {Dr.},
address = {Jülich},
publisher = {Forschungszentrum Jülich GmbH Zentralbibliothek, Verlag},
reportid = {FZJ-2018-02634},
isbn = {978-3-95806-319-8},
series = {Schriften des Forschungszentrums Jülich. Reihe
Schlüsseltechnologien / Key Technologies},
pages = {VI, 133 S.},
year = {2018},
note = {Universität Köln, Diss., 2017},
abstract = {In this work the impact of biaxial strain on the electronic
properties of epitaxial grown oxide thin films is analyzed
and discussed using two perovskite systems,
(Ba$_{x}$Sr$_{1-x}$)TiO$_{3}$ and
(K$_{x}$Na$_{1-x}$)NbO$_{3}$. We show that the phase
transition temperature of the oxide films can be tuned via
in-plane biaxial strain. Compressive strain leads to a
reduction of the transition temperature, tensile strain
increases the transition temperature. As a result, the
electronic properties (i.e. dielectric constant,
piezoelectric effect, and even conductivity) are modified.
Possible applications of this “engineering” of the
electronic properties of oxide films are demonstrated.
Strain of ±1.7\% in perovskites thin films is generated by
the mismatch of the lattice parameters of film and
substrate. (Ba$_{x}$Sr$_{1-x}$)TiO$_{3}$ (x = 0, 0.125,
0.37, 1) and K$_{0.7}$Na$_{0.3}$NbO$_{3}$ films with a
thickness ranging between 5 nm and 200 nm are deposited on
various scandites ((110) oriented DyScO$_{3}$, TbScO$_{3}$,
GdScO$_{3}$, and SmScO$_{3}$) using either pulse laser
deposition or metal-organic chemical vapor deposition. For
the characterization metallic electrodes (Pt or Ti/Pt) are
prepared on the oxide film using e-beam lithography and
lift-off technology. The structural properties of the
biaxial strained thin films are carefully examined via X-ray
diffraction, Rutherford backscattering spectrometry,
time-of-flight secondary ion mass spectroscopy, and scanning
electron microscopy. Cryoelectronic measurements are used to
analyze the electronic properties in a temperature range of
5 K to 500 K. The major results are: (i) In oxide
ferroelectric thin films, both compressive and tensile
biaxial strain result in a material and strain dependent
shift of the phase transition temperature of up to several
100 K. For instance, 1.2 \% tensile strain shifts the
transition temperature by ~300 K in SrTiO$_{3}$ while -0.6
\% compressive stress leads to a reduction of the phase
transition temperature by ~300 K in
K$_{0.7}$Na$_{0.3}$NbO$_{3}$. (ii) The dielectric constant
can be modified at a desired temperature (typically room
temperature) via the shift of the phase transition towards
this temperature. For instance in case of SrTiO$_{3}$ the
permittivity is enhanced from ~300 (unstrained bulk
SrTiO$_{3}$) to ~8000 by moving the phase transition
temperature to room temperature. (iii) The piezoelectric
properties of the oxide films are also tailored via strain.
As a result surface acoustic waves can be generated in
strained thin (e.g. 27 nm) K$_{0.7}$Na$_{0.3}$NbO$_{3}$
films. The strength of the surface acoustic wave signal
correlates to the phase transition of the films and might be
used for extremely sensitive sensor systems. (iv) Finally,
the conductivity of strained SrTiO$_{3}$ films is enhanced
due to the increased mobility of electrons and oxygen
vacancies. Using an adequate electrode design which affects
the electric field and thus temperature distribution in the
film, memristor behavior and even a plasiticity of the
resistive behavior can be obtained. The latter can be used
for applications ranging from the simulation of a biological
synapsis to neuromorphic engineering.},
cin = {ICS-8},
cid = {I:(DE-Juel1)ICS-8-20110106},
pnm = {899 - ohne Topic (POF3-899)},
pid = {G:(DE-HGF)POF3-899},
typ = {PUB:(DE-HGF)3 / PUB:(DE-HGF)11},
urn = {urn:nbn:de:0001-2018050917},
url = {https://juser.fz-juelich.de/record/845360},
}