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@PHDTHESIS{Zhang:845739,
      author       = {Zhang, Wendi},
      title        = {{I}on beam treatment of functional layers in thin-film
                      silicon solar cells},
      volume       = {170},
      school       = {RWTH Aachen},
      type         = {Dr.},
      address      = {Jülich},
      publisher    = {Forschungszentrum Jülich GmbH Zentralbibliothek, Verlag},
      reportid     = {FZJ-2018-02951},
      isbn         = {978-3-89336-864-8},
      series       = {Schriften des Forschungszentrums Jülich Reihe Energie $\&$
                      Umwelt / Energy $\&$ Environment},
      pages        = {XI, 191 S : zahlr. Ill. u. graph. Darst},
      year         = {2013},
      note         = {RWTH Aachen, Diss., 2012},
      abstract     = {In silicon thin-film solar cells, transparent conductive
                      layers have to fulfill the followingrequirements: high
                      conductivity as effective contact, high transparency to
                      transmit thelight into the cell, and a textured surface
                      which provides light scattering. Magnetronsputtered and
                      wet-chemically textured aluminum doped zinc oxide (ZnO:Al)
                      films arewidely used as the transparent conductor. The
                      technological goal of this dissertation isto develop an
                      alternative to the wet etching process for light trapping in
                      the thin siliconabsorber layers through modification of the
                      glass/ZnO:Al or ZnO:Al/Si interfaces byion beam treatment.
                      The study focuses on the textured growth of ZnO:Al films on
                      ionbeam pretreated glass substrates, and the preparation and
                      application of textured glassfor light trapping.The
                      technological aspects such as the etch rates of the glass
                      substrate and ZnO:Alfilms with different ion beam
                      configurations were studied. The experimental etch ratesare
                      compared with simulated and theoretically predicted values.
                      With regard to the ionbeam treatment of glass substrate, the
                      influence of the ion pretreated glass on the growthof ZnO:Al
                      films was investigated. The ZnO:Al films grown on ion beam
                      pretreatedglass substrates exhibit self-textured morphology
                      with surface roughness of 40 nm whileremaining highly
                      conductive. Silicon thin-film solar cells prepared on the
                      as-grown roughZnO:Al films show that this front contact can
                      provide excellent light trapping effect.The highest initial
                      efficiencies for amorphous single junction solar cells on
                      as-grownrough ZnO:Al films was 9.4 $\%.$ The as-grown rough
                      morphology was attributed to largeconical ZnO:Al grains
                      initiated from the ion pretreated glass surface. It was
                      found thatthe roughness of the as-grown rough ZnO:Al film is
                      proportional to the number of Odangling bonds created by ion
                      beam treatment on the glass substrate. A growth modelwas
                      proposed to explain the growth mechanism of ZnO:Al films on
                      Zn- and O-polar ZnOsingle crystals, as well as on untreated
                      and ion beam treated glass substrates.With regard to the ion
                      beam treatment of ZnO:Al films, the influence of the
                      iontreatment on the surface morphology, HCl etching, silicon
                      growth, and additional ZnO:Algrowth was investigated. Ion
                      beam etching has a smoothening effect on the texturedZnO:Al
                      films. Using sputtered and wet chemically etched ZnO:Al as
                      ion beam etchingmask, textured glass with features similar
                      to the ZnO:Al films were obtained. Texturedglass with a wide
                      range of morphologies was prepared by varying the etching
                      mask andthe ion beam treatment conditions. Finally, as-grown
                      textured ZnO:Al films prepared onion beam treated textured
                      glass, which exhibit ’double textured’ features, were
                      producedand applied in solar cells.The ion beam treatment
                      enabled the preparation of light scattering surfaces by
                      texturedglass and as-grown rough ZnO:Al films without the
                      need of wet etching betweenTCO preparation and absorber
                      deposition. Further, new ’double textured’ surface
                      structurescould be created by the combination of both
                      techniques. Solar cells with efficiencyof 11.9 $\%$ proved
                      the applicability as-grown textured ZnO:Al for light
                      trapping. Thegrowth studies provided deeper insights and a
                      new understanding of ZnO structure formationand will govern
                      optimization of ZnO:Al film properties.},
      keywords     = {Solarzelle (gnd)},
      cin          = {IEK-5},
      ddc          = {500},
      cid          = {I:(DE-Juel1)IEK-5-20101013},
      pnm          = {899 - ohne Topic (POF3-899)},
      pid          = {G:(DE-HGF)POF3-899},
      typ          = {PUB:(DE-HGF)3 / PUB:(DE-HGF)11},
      url          = {https://juser.fz-juelich.de/record/845739},
}