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@PHDTHESIS{Zhang:845739,
author = {Zhang, Wendi},
title = {{I}on beam treatment of functional layers in thin-film
silicon solar cells},
volume = {170},
school = {RWTH Aachen},
type = {Dr.},
address = {Jülich},
publisher = {Forschungszentrum Jülich GmbH Zentralbibliothek, Verlag},
reportid = {FZJ-2018-02951},
isbn = {978-3-89336-864-8},
series = {Schriften des Forschungszentrums Jülich Reihe Energie $\&$
Umwelt / Energy $\&$ Environment},
pages = {XI, 191 S : zahlr. Ill. u. graph. Darst},
year = {2013},
note = {RWTH Aachen, Diss., 2012},
abstract = {In silicon thin-film solar cells, transparent conductive
layers have to fulfill the followingrequirements: high
conductivity as effective contact, high transparency to
transmit thelight into the cell, and a textured surface
which provides light scattering. Magnetronsputtered and
wet-chemically textured aluminum doped zinc oxide (ZnO:Al)
films arewidely used as the transparent conductor. The
technological goal of this dissertation isto develop an
alternative to the wet etching process for light trapping in
the thin siliconabsorber layers through modification of the
glass/ZnO:Al or ZnO:Al/Si interfaces byion beam treatment.
The study focuses on the textured growth of ZnO:Al films on
ionbeam pretreated glass substrates, and the preparation and
application of textured glassfor light trapping.The
technological aspects such as the etch rates of the glass
substrate and ZnO:Alfilms with different ion beam
configurations were studied. The experimental etch ratesare
compared with simulated and theoretically predicted values.
With regard to the ionbeam treatment of glass substrate, the
influence of the ion pretreated glass on the growthof ZnO:Al
films was investigated. The ZnO:Al films grown on ion beam
pretreatedglass substrates exhibit self-textured morphology
with surface roughness of 40 nm whileremaining highly
conductive. Silicon thin-film solar cells prepared on the
as-grown roughZnO:Al films show that this front contact can
provide excellent light trapping effect.The highest initial
efficiencies for amorphous single junction solar cells on
as-grownrough ZnO:Al films was 9.4 $\%.$ The as-grown rough
morphology was attributed to largeconical ZnO:Al grains
initiated from the ion pretreated glass surface. It was
found thatthe roughness of the as-grown rough ZnO:Al film is
proportional to the number of Odangling bonds created by ion
beam treatment on the glass substrate. A growth modelwas
proposed to explain the growth mechanism of ZnO:Al films on
Zn- and O-polar ZnOsingle crystals, as well as on untreated
and ion beam treated glass substrates.With regard to the ion
beam treatment of ZnO:Al films, the influence of the
iontreatment on the surface morphology, HCl etching, silicon
growth, and additional ZnO:Algrowth was investigated. Ion
beam etching has a smoothening effect on the texturedZnO:Al
films. Using sputtered and wet chemically etched ZnO:Al as
ion beam etchingmask, textured glass with features similar
to the ZnO:Al films were obtained. Texturedglass with a wide
range of morphologies was prepared by varying the etching
mask andthe ion beam treatment conditions. Finally, as-grown
textured ZnO:Al films prepared onion beam treated textured
glass, which exhibit ’double textured’ features, were
producedand applied in solar cells.The ion beam treatment
enabled the preparation of light scattering surfaces by
texturedglass and as-grown rough ZnO:Al films without the
need of wet etching betweenTCO preparation and absorber
deposition. Further, new ’double textured’ surface
structurescould be created by the combination of both
techniques. Solar cells with efficiencyof 11.9 $\%$ proved
the applicability as-grown textured ZnO:Al for light
trapping. Thegrowth studies provided deeper insights and a
new understanding of ZnO structure formationand will govern
optimization of ZnO:Al film properties.},
keywords = {Solarzelle (gnd)},
cin = {IEK-5},
ddc = {500},
cid = {I:(DE-Juel1)IEK-5-20101013},
pnm = {899 - ohne Topic (POF3-899)},
pid = {G:(DE-HGF)POF3-899},
typ = {PUB:(DE-HGF)3 / PUB:(DE-HGF)11},
url = {https://juser.fz-juelich.de/record/845739},
}