TY  - JOUR
AU  - Hensling, Felix
AU  - Keeble, D. J.
AU  - Zhu, J.
AU  - Brose, S.
AU  - Xu, C.
AU  - Gunkel, F.
AU  - Danylyuk, S.
AU  - Nonnenmann, S. S.
AU  - Egger, W.
AU  - Dittmann, R.
TI  - UV radiation enhanced oxygen vacancy formation caused by the PLD plasma plume
JO  - Scientific reports
VL  - 8
IS  - 1
SN  - 2045-2322
CY  - London
PB  - Nature Publishing Group
M1  - FZJ-2018-03439
SP  - 8846
PY  - 2018
AB  - Pulsed Laser Deposition is a commonly used non-equilibrium physical deposition technique for the growth of complex oxide thin films. A wide range of parameters is known to influence the properties of the used samples and thin films, especially the oxygen-vacancy concentration. One parameter has up to this point been neglected due to the challenges of separating its influence from the influence of the impinging species during growth: the UV-radiation of the plasma plume. We here present experiments enabled by a specially designed holder to allow a separation of these two influences. The influence of the UV-irradiation during pulsed laser deposition on the formation of oxygen-vacancies is investigated for the perovskite model material SrTiO3. The carrier concentration of UV-irradiated samples is nearly constant with depth and time. By contrast samples not exposed to the radiation of the plume show a depth dependence and a decrease in concentration over time. We reveal an increase in Ti-vacancy–oxygen-vacancy-complexes for UV irradiated samples, consistent with the different carrier concentrations. We find a UV enhanced oxygen-vacancy incorporation rate as responsible mechanism. We provide a complete picture of another influence parameter to be considered during pulsed laser depositions and unravel the mechanism behind persistent-photo-conductivity in SrTiO3.
LB  - PUB:(DE-HGF)16
C6  - pmid:29892095
UR  - <Go to ISI:>//WOS:000434776600052
DO  - DOI:10.1038/s41598-018-27207-5
UR  - https://juser.fz-juelich.de/record/848173
ER  -