%0 Conference Paper
%A Aussen, Stephan
%A Skaja, Katharina
%A Hardtdegen, Alexander
%A Hoffmann-Eifert, Susanne
%T Interfaces formed by ALD metal oxide growth on metal layers
%M FZJ-2018-03660
%D 2017
%B 232nd ECS Meeting
%C 1 Oct 2017 - 5 Oct 2017, National Harbor (USA)
Y2 1 Oct 2017 - 5 Oct 2017
M2 National Harbor, USA
%F PUB:(DE-HGF)6
%9 Conference Presentation
%U https://juser.fz-juelich.de/record/848424