TY  - CONF
AU  - Aussen, Stephan
AU  - Skaja, Katharina
AU  - Hardtdegen, Alexander
AU  - Hoffmann-Eifert, Susanne
TI  - Interfaces formed by ALD metal oxide growth on metal layers
M1  - FZJ-2018-03660
PY  - 2017
T2  - 232nd ECS Meeting
CY  - 1 Oct 2017 - 5 Oct 2017, National Harbor (USA)
Y2  - 1 Oct 2017 - 5 Oct 2017
M2  - National Harbor, USA
LB  - PUB:(DE-HGF)6
UR  - https://juser.fz-juelich.de/record/848424
ER  -