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@ARTICLE{Sladek:8485,
author = {Sladek, K. and Klinger, V. and Wensorra, J. and Akabori, M.
and Hardtdegen, H. and Grützmacher, D.},
title = {{MOVPE} of n-doped {G}a{A}s and modulation doped
{G}a{A}s/{A}l{G}a{A}s nanowires},
journal = {Journal of crystal growth},
volume = {312},
issn = {0022-0248},
address = {Amsterdam [u.a.]},
publisher = {Elsevier},
reportid = {PreJuSER-8485},
pages = {635 - 640},
year = {2010},
note = {The authors thank K. Wirtz for his support in MOVPE, and
Dr. S. Trellenkamp for electron-beam lithography. One of the
authors (M.A.) was financially supported by a JSPS
Postdoctoral Fellowship for research abroad.},
abstract = {Two different fabrication approaches were compared to
obtain conductive GaAs nanowires: on one hand by modulation
doping of GaAs/AlGaAs core/shell nanowires, on the other
hand by Si-doping of GaAs nanowires. Modulation doped
GaAs/AlGaAs core-shell nanowires were grown by selective
area metal organic vapor phase epitaxy (MOVPE) on GaAs (1 1
1) substrates. The influences of growth parameters and mask
design on aspect ratio of the core structures were
investigated. The specialty of this study was that the
growth mode was switched from vertical GaAs wire growth to
the AlGaAs conformal shell overgrowth by intentionally
changing the growth chemistry from the use of a more stable
group III source - trimethylgallium (TMGa) to more easily
decomposed sources - the alternative sources triethylgallium
(TEGa) and dimethylethylaminealane (DMEAAI). It was found
that the diameter and length of the core structures strongly
depend on the arsenic partial pressure and growth
temperature as well as mask design. The uniformity of shell
growth is also influenced by the mask design. Additionally
an alternative approach for the production of conductive
GaAs nanowires was under study. To this end, the influence
of Si-doping on GaAs core growth was investigated. it was
found that doping has a detrimental impact on growth
morphology leading to an undesirable enhanced growth rate on
the nanowire side facets. (C) 2009 Elsevier B.V. All rights
reserved.},
keywords = {J (WoSType)},
cin = {IBN-1 / JARA-FIT},
ddc = {540},
cid = {I:(DE-Juel1)VDB799 / $I:(DE-82)080009_20140620$},
pnm = {Grundlagen für zukünftige Informationstechnologien},
pid = {G:(DE-Juel1)FUEK412},
shelfmark = {Crystallography / Materials Science, Multidisciplinary /
Physics, Applied},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000275137100002},
doi = {10.1016/j.jcrysgro.2009.11.026},
url = {https://juser.fz-juelich.de/record/8485},
}