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@ARTICLE{SchulteBraucks:849688,
author = {Schulte-Braucks, Christian and Pandey, Rahul and Sajjad,
Redwan Noor and Barth, Mike and Ghosh, Ram Krishna and
Grisafe, Ben and Sharma, Pankaj and von den Driesch, Nils
and Vohra, Anurag and Rayner, Gilbert Bruce and Loo, Roger
and Mantl, Siegfried and Buca, Dan Mihai and Yeh, Chih-Chieh
and Wu, Cheng-Hsien and Tsai, Wilman and Antoniadis, Dimitri
A. and Datta, Suman},
title = {{F}abrication, {C}haracterization, and {A}nalysis of
{G}e/{G}e{S}n {H}eterojunction p-{T}ype {T}unnel
{T}ransistors},
journal = {IEEE transactions on electron devices},
volume = {64},
number = {10},
issn = {1557-9646},
address = {New York, NY},
publisher = {IEEE},
reportid = {FZJ-2018-03824},
pages = {4354 - 4362},
year = {2017},
abstract = {We present a detailed study on fabrication and
characterization of Ge/GeSn heterojunction p-type
tunnel-field-effect-transistors (TFETs). Critical process
modules as high-k stack and p-i-n diodes are addressed
individually. As a result an ultrathin equivalent oxide
thickness of 0.84 nm with an accumulation capacitance of 3
μF/cm2 was achieved on an extremely scaled tri-layer stack
of GeSnOx/Al2O3/HfO2 deposited by atomic-layer deposition
monitored in situ by spectroscopic ellipsometry. Combining
these process modules, Ge/GeSn heterojunction pTFETs are
fabricated and characterized to demonstrate the best
in-class pTFET performance in the GeSn material system. The
transfer characteristics of the TFETs show signatures of the
trap-assisted thermal generation in the subthreshold regime
which is explained by a modified Shockley- Read-Hall model.
For the ON-state current, we used band-to-band tunneling
models calculated using parameters from the density
functional theory. We then use the calibrated model to
project performance of GeSn pTFETs with increased Sn content
(lower bandgap), reduced trap density and ultrathin body
geometry. Both experimental and projected results are
benchmarked against state-of-the art III-V (e.g.,
In0.65Ga0.35/GaAs0.4Sb0.6) pTFETs. We demonstrate the
ability of GeSn to achieve superior performance with both
high ON-current and sub-60 mV/decade switching benefiting
from the small and direct bandgap for higher Sn contents.},
cin = {PGI-9 / JARA-FIT},
ddc = {620},
cid = {I:(DE-Juel1)PGI-9-20110106 / $I:(DE-82)080009_20140620$},
pnm = {521 - Controlling Electron Charge-Based Phenomena
(POF3-521)},
pid = {G:(DE-HGF)POF3-521},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000413728700056},
doi = {10.1109/TED.2017.2742957},
url = {https://juser.fz-juelich.de/record/849688},
}