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@ARTICLE{Skaja:849842,
      author       = {Skaja, Katharina and Andrä, Michael and Rana, Vikas and
                      Waser, Rainer and Dittmann, Regina and Baeumer, Christoph},
      title        = {{R}eduction of the forming voltage through tailored oxygen
                      non-stoichiometry in tantalum oxide {R}e{RAM} devices},
      journal      = {Scientific reports},
      volume       = {8},
      number       = {1},
      issn         = {2045-2322},
      address      = {London},
      publisher    = {Nature Publishing Group},
      reportid     = {FZJ-2018-03945},
      pages        = {10861},
      year         = {2018},
      abstract     = {In this study, we investigated the influence of oxygen
                      non-stoichiometry on the resistive switching performance of
                      tantalum oxide based memristive devices. Thin-films of
                      tantalum oxide were deposited with varying sputter power and
                      oxygen partial pressure. The electroforming voltage was
                      found to decrease with increasing power density or decreased
                      oxygen partial pressure, while the endurance remained stable
                      and the resistance window ROFF/RON was found to increase.
                      In-depth XPS analysis connects these observations to a
                      controllable oxygen sub-stoichiometry in the
                      sputter-deposited films. Our analysis shows that the
                      decrease of the forming voltage results from an increase in
                      carrier density in the as-prepared thin-films, which is
                      induced by the presence of oxygen vacancies.},
      cin          = {PGI-7},
      ddc          = {000},
      cid          = {I:(DE-Juel1)PGI-7-20110106},
      pnm          = {521 - Controlling Electron Charge-Based Phenomena
                      (POF3-521)},
      pid          = {G:(DE-HGF)POF3-521},
      typ          = {PUB:(DE-HGF)16},
      pubmed       = {pmid:30022129},
      UT           = {WOS:000439026000022},
      doi          = {10.1038/s41598-018-28992-9},
      url          = {https://juser.fz-juelich.de/record/849842},
}