TY  - JOUR
AU  - Grieb, Tim
AU  - Krause, Florian F.
AU  - Schowalter, Marco
AU  - Zillmann, Dennis
AU  - Sellin, Roman
AU  - Müller-Caspary, Knut
AU  - Mahr, Christoph
AU  - Mehrtens, Thorsten
AU  - Bimberg, Dieter
AU  - Rosenauer, Andreas
TI  - Strain analysis from nano-beam electron diffraction: Influence of specimen tilt and beam convergence
JO  - Ultramicroscopy
VL  - 190
SN  - 0304-3991
CY  - Amsterdam
PB  - Elsevier Science
M1  - FZJ-2018-04276
SP  - 45 - 57
PY  - 2018
AB  - Strain analyses from experimental series of nano-beam electron diffraction (NBED) patterns in scanning transmission electron microscopy are performed for different specimen tilts. Simulations of NBED series are presented for which strain analysis gives results that are in accordance with experiment. This consequently allows to study the relation between measured strain and actual underlying strain. A two-tilt method which can be seen as lowest-order electron beam precession is suggested and experimentally implemented. Strain determination from NBED series with increasing beam convergence is performed in combination with the experimental realization of a probe-forming aperture with a cross inside. It is shown that using standard evaluation techniques, the influence of beam convergence on spatial resolution is lower than the influence of sharp rings around the diffraction disc which occur at interfaces and which are caused by the tails of the intensity distribution of the electron probe.
LB  - PUB:(DE-HGF)16
C6  - pmid:29783102
UR  - <Go to ISI:>//WOS:000432868800006
DO  - DOI:10.1016/j.ultramic.2018.03.013
UR  - https://juser.fz-juelich.de/record/850202
ER  -