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000850203 0247_ $$2doi$$a10.1016/j.ultramic.2017.09.012
000850203 0247_ $$2pmid$$apmid:29078105
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000850203 037__ $$aFZJ-2018-04277
000850203 041__ $$aEnglish
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000850203 1001_ $$0P:(DE-HGF)0$$aGrieb, Tim$$b0$$eCorresponding author
000850203 245__ $$aQuantitative HAADF STEM of SiGe in presence of amorphous surface layers from FIB preparation
000850203 260__ $$aAmsterdam$$bElsevier Science$$c2018
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000850203 520__ $$aThe chemical composition of four SiGex layers grown on silicon was determined from quantitative scanning transmission electron microscopy (STEM). The chemical analysis was performed by a comparison of the high-angle annular dark field (HAADF) intensity with multislice simulations. It could be shown that amorphous surface layers originating from the preparation process by focused-ion beam (FIB) at 30 kV have a strong influence on the quantification: the local specimen thickness is overestimated by approximately a factor of two, and the germanium concentration is substantially underestimated. By means of simulations, the effect of amorphous surface layers on the HAADF intensity of crystalline silicon and germanium is investigated. Based on these simulations, a method is developed to analyze the experimental HAADF-STEM images by taking the influence of the amorphous layers into account which is done by a reduction of the intensities by multiplication with a constant factor. This suggested modified HAADF analysis gives germanium concentrations which are in agreement with the nominal values. The same TEM lamella was treated with low-voltage ion milling which removed the amorphous surface layers completely. The results from subsequent quantitative HAADF analyses are in agreement with the nominal concentrations which validates the applicability of the used frozen-lattice based multislice simulations to describe the HAADF scattering of SiGex in STEM.
000850203 536__ $$0G:(DE-HGF)POF3-143$$a143 - Controlling Configuration-Based Phenomena (POF3-143)$$cPOF3-143$$fPOF III$$x0
000850203 7001_ $$0P:(DE-HGF)0$$aTewes, Moritz$$b1
000850203 7001_ $$0P:(DE-HGF)0$$aSchowalter, Marco$$b2
000850203 7001_ $$0P:(DE-Juel1)165314$$aMüller-Caspary, Knut$$b3
000850203 7001_ $$0P:(DE-HGF)0$$aKrause, Florian F.$$b4
000850203 7001_ $$0P:(DE-HGF)0$$aMehrtens, Thorsten$$b5
000850203 7001_ $$0P:(DE-HGF)0$$aHartmann, Jean Michel$$b6
000850203 7001_ $$0P:(DE-HGF)0$$aRosenauer, Andreas$$b7
000850203 773__ $$0PERI:(DE-600)1479043-9$$a10.1016/j.ultramic.2017.09.012$$nPart B$$p29 - 36$$tUltramicroscopy$$v184$$x0304-3991$$y2018
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