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@ARTICLE{Kindsmller:851662,
author = {Kindsmüller, A. and Schmitz, C. and Wiemann, C. and Skaja,
K. and Wouters, D. J. and Waser, R. and Schneider, C. M. and
Dittmann, R.},
title = {{V}alence change detection in memristive oxide based
heterostructure cells by hard {X}-ray photoelectron emission
spectroscopy},
journal = {APL materials},
volume = {6},
number = {4},
issn = {2166-532X},
address = {Melville, NY},
publisher = {AIP Publ.},
reportid = {FZJ-2018-05212},
pages = {046106 -},
year = {2018},
abstract = {The switching mechanism of valence change resistive memory
devices is widely accepted to be an ionic movement of oxygen
vacancies resulting in a valence change of the metal
cations. However, direct experimental proofs of valence
changes in memristive devices are scarce. In this work, we
have employed hard X-ray photoelectron emission microscopy
(PEEM) to probe local valence changes in Pt/ZrOx/Ta
memristive devices. The use of hard X-ray radiation
increases the information depth, thus providing chemical
information from buried layers. By extracting X-ray
photoelectron spectra from different locations in the PEEM
images, we show that zirconia in the active device area is
reduced compared to a neighbouring region, confirming the
valence change in the ZrOx film during electroforming.
Furthermore, we succeeded in measuring the Ta 4f spectrum
for two different resistance states on the same device. In
both states, as well as outside the device region, the Ta
electrode is composed of different suboxides without any
metallic contribution, hinting to the formation of TaOx
during the deposition of the Ta thin film. We observed a
reduction of the Ta oxidation state in the low resistance
state with respect to the high resistive state. This
observation is contradictory to the established model, as
the internal redistribution of oxygen between ZrOx and the
Ta electrode during switching would lead to an oxidation of
the Ta layer in the low resistance state. Instead, we have
to conclude that the Ta electrode takes an active part in
the switching process in our devices and that oxygen is
released and reincorporated in the ZrOx/TaOx bilayer during
switching. This is confirmed by the degradation of the high
resistance state during endurance measurements under
vacuum.},
cin = {PGI-7 / JARA-FIT / PGI-6},
ddc = {620},
cid = {I:(DE-Juel1)PGI-7-20110106 / $I:(DE-82)080009_20140620$ /
I:(DE-Juel1)PGI-6-20110106},
pnm = {521 - Controlling Electron Charge-Based Phenomena
(POF3-521)},
pid = {G:(DE-HGF)POF3-521},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000431141500006},
doi = {10.1063/1.5026063},
url = {https://juser.fz-juelich.de/record/851662},
}