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@ARTICLE{Oelmann:852584,
      author       = {Oelmann, J. and Gierse, N. and Li, C. and Brezinsek, S. and
                      Zlobinski, M. and Turan, B. and Haas, S. and Linsmeier, Ch.},
      title        = {{D}epth-resolved sample composition analysis using
                      laser-induced ablation-quadrupole mass spectrometry and
                      laser-induced breakdown spectroscopy},
      journal      = {Spectrochimica acta / B},
      volume       = {144},
      issn         = {0584-8547},
      address      = {Amsterdam [u.a.]},
      publisher    = {Elsevier},
      reportid     = {FZJ-2018-05496},
      pages        = {38-45},
      year         = {2018},
      abstract     = {Monitoring a sample's material composition became more and
                      more important over the last years for both - industrial
                      process control as well as for post mortem analysis in
                      research and industrial development. Although material
                      composition identification as well as a comparison with
                      standard samples works fine, there is a lack of diagnostics
                      which can provide quantitative information with depth
                      resolution without any standard samples.We present a novel
                      method utilizing a residual gas analysis with quadrupole
                      mass spectrometry after picosecond laser-induced ablation
                      and release of volatile species. In the present experiment,
                      well characterized multilayer thin film solar cells
                      (μc-Si:H and a-Si:D as p-i-n-junctions on ZnO:Al
                      electrodes) are used as a set of well characterized material
                      samples to demonstrate the capabilities of the new
                      method.The linearity of the spectrometer signal to gas
                      pressure simplifies its calibration and reduces its
                      uncertainties in comparison with other analysis techniques,
                      although high vacuum conditions (10−6 hPa to 10−7 hPa)
                      are required to reach high sensitivity better than the
                      percent-range. Moreover, the laser-ablation based sample
                      analysis requires no preparation of the sample and is
                      flexible regarding ablation rates. The application of a
                      picosecond laser pulse ensures that the thermal penetration
                      depth of the laser is in the same order of magnitude as the
                      ablation rate, which enables to achieve depth resolutions in
                      the order of 100 nm and avoids matrix mixing effects at the
                      edge of the laser-induced crater in the sample.},
      cin          = {IEK-4 / INM-1 / INM-2},
      ddc          = {540},
      cid          = {I:(DE-Juel1)IEK-4-20101013 / I:(DE-Juel1)INM-1-20090406 /
                      I:(DE-Juel1)INM-2-20090406},
      pnm          = {113 - Methods and Concepts for Material Development
                      (POF3-113)},
      pid          = {G:(DE-HGF)POF3-113},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000433647200006},
      doi          = {10.1016/j.sab.2018.03.009},
      url          = {https://juser.fz-juelich.de/record/852584},
}