Home > Publications database > Depth-resolved sample composition analysis using laser-induced ablation-quadrupole mass spectrometry and laser-induced breakdown spectroscopy > print

001     852584
005     20240711113530.0
024 7 _ |a 10.1016/j.sab.2018.03.009
|2 doi
024 7 _ |a WOS:000433647200006
|2 WOS
024 7 _ |a altmetric:35840232
|2 altmetric
037 _ _ |a FZJ-2018-05496
082 _ _ |a 540
100 1 _ |a Oelmann, J.
|0 P:(DE-Juel1)169485
|b 0
|e Corresponding author
|u fzj
245 _ _ |a Depth-resolved sample composition analysis using laser-induced ablation-quadrupole mass spectrometry and laser-induced breakdown spectroscopy
260 _ _ |a Amsterdam [u.a.]
|c 2018
|b Elsevier
336 7 _ |a article
|2 DRIVER
336 7 _ |a Output Types/Journal article
|2 DataCite
336 7 _ |a Journal Article
|b journal
|m journal
|0 PUB:(DE-HGF)16
|s 1538058931_32637
|2 PUB:(DE-HGF)
336 7 _ |a ARTICLE
|2 BibTeX
336 7 _ |a JOURNAL_ARTICLE
|2 ORCID
336 7 _ |a Journal Article
|0 0
|2 EndNote
520 _ _ |a Monitoring a sample's material composition became more and more important over the last years for both - industrial process control as well as for post mortem analysis in research and industrial development. Although material composition identification as well as a comparison with standard samples works fine, there is a lack of diagnostics which can provide quantitative information with depth resolution without any standard samples.We present a novel method utilizing a residual gas analysis with quadrupole mass spectrometry after picosecond laser-induced ablation and release of volatile species. In the present experiment, well characterized multilayer thin film solar cells (μc-Si:H and a-Si:D as p-i-n-junctions on ZnO:Al electrodes) are used as a set of well characterized material samples to demonstrate the capabilities of the new method.The linearity of the spectrometer signal to gas pressure simplifies its calibration and reduces its uncertainties in comparison with other analysis techniques, although high vacuum conditions (10−6 hPa to 10−7 hPa) are required to reach high sensitivity better than the percent-range. Moreover, the laser-ablation based sample analysis requires no preparation of the sample and is flexible regarding ablation rates. The application of a picosecond laser pulse ensures that the thermal penetration depth of the laser is in the same order of magnitude as the ablation rate, which enables to achieve depth resolutions in the order of 100 nm and avoids matrix mixing effects at the edge of the laser-induced crater in the sample.
536 _ _ |a 113 - Methods and Concepts for Material Development (POF3-113)
|0 G:(DE-HGF)POF3-113
|c POF3-113
|f POF III
|x 0
588 _ _ |a Dataset connected to DataCite
700 1 _ |a Gierse, N.
|0 P:(DE-Juel1)7885
|b 1
|u fzj
700 1 _ |a Li, C.
|0 P:(DE-Juel1)174035
|b 2
|u fzj
700 1 _ |a Brezinsek, S.
|0 P:(DE-Juel1)129976
|b 3
|u fzj
700 1 _ |a Zlobinski, M.
|0 P:(DE-Juel1)172037
|b 4
|u fzj
700 1 _ |a Turan, B.
|0 P:(DE-Juel1)145058
|b 5
700 1 _ |a Haas, S.
|0 P:(DE-Juel1)7935
|b 6
|u fzj
700 1 _ |a Linsmeier, Ch.
|0 P:(DE-Juel1)157640
|b 7
|u fzj
773 _ _ |a 10.1016/j.sab.2018.03.009
|0 PERI:(DE-600)2032264-1
|p 38-45
|t Spectrochimica acta / B
|v 144
|y 2018
|x 0584-8547
856 4 _ |u https://juser.fz-juelich.de/record/852584/files/1-s2.0-S0584854717304287-main.pdf
|y Restricted
856 4 _ |u https://juser.fz-juelich.de/record/852584/files/1-s2.0-S0584854717304287-main.pdf?subformat=pdfa
|x pdfa
|y Restricted
909 C O |o oai:juser.fz-juelich.de:852584
|p VDB
910 1 _ |a Forschungszentrum Jülich
|0 I:(DE-588b)5008462-8
|k FZJ
|b 0
|6 P:(DE-Juel1)169485
910 1 _ |a Forschungszentrum Jülich
|0 I:(DE-588b)5008462-8
|k FZJ
|b 1
|6 P:(DE-Juel1)7885
910 1 _ |a Forschungszentrum Jülich
|0 I:(DE-588b)5008462-8
|k FZJ
|b 2
|6 P:(DE-Juel1)174035
910 1 _ |a Forschungszentrum Jülich
|0 I:(DE-588b)5008462-8
|k FZJ
|b 3
|6 P:(DE-Juel1)129976
910 1 _ |a Forschungszentrum Jülich
|0 I:(DE-588b)5008462-8
|k FZJ
|b 4
|6 P:(DE-Juel1)172037
910 1 _ |a Forschungszentrum Jülich
|0 I:(DE-588b)5008462-8
|k FZJ
|b 6
|6 P:(DE-Juel1)7935
910 1 _ |a Forschungszentrum Jülich
|0 I:(DE-588b)5008462-8
|k FZJ
|b 7
|6 P:(DE-Juel1)157640
913 1 _ |a DE-HGF
|l Energieeffizienz, Materialien und Ressourcen
|1 G:(DE-HGF)POF3-110
|0 G:(DE-HGF)POF3-113
|2 G:(DE-HGF)POF3-100
|v Methods and Concepts for Material Development
|x 0
|4 G:(DE-HGF)POF
|3 G:(DE-HGF)POF3
|b Energie
914 1 _ |y 2018
915 _ _ |a Nationallizenz
|0 StatID:(DE-HGF)0420
|2 StatID
915 _ _ |a DBCoverage
|0 StatID:(DE-HGF)0300
|2 StatID
|b Medline
915 _ _ |a JCR
|0 StatID:(DE-HGF)0100
|2 StatID
|b SPECTROCHIM ACTA B : 2015
915 _ _ |a DBCoverage
|0 StatID:(DE-HGF)0200
|2 StatID
|b SCOPUS
915 _ _ |a DBCoverage
|0 StatID:(DE-HGF)0600
|2 StatID
|b Ebsco Academic Search
915 _ _ |a Peer Review
|0 StatID:(DE-HGF)0030
|2 StatID
|b ASC
915 _ _ |a DBCoverage
|0 StatID:(DE-HGF)0199
|2 StatID
|b Thomson Reuters Master Journal List
915 _ _ |a WoS
|0 StatID:(DE-HGF)0110
|2 StatID
|b Science Citation Index
915 _ _ |a DBCoverage
|0 StatID:(DE-HGF)0150
|2 StatID
|b Web of Science Core Collection
915 _ _ |a WoS
|0 StatID:(DE-HGF)0111
|2 StatID
|b Science Citation Index Expanded
915 _ _ |a DBCoverage
|0 StatID:(DE-HGF)1150
|2 StatID
|b Current Contents - Physical, Chemical and Earth Sciences
915 _ _ |a DBCoverage
|0 StatID:(DE-HGF)1050
|2 StatID
|b BIOSIS Previews
915 _ _ |a IF < 5
|0 StatID:(DE-HGF)9900
|2 StatID
920 1 _ |0 I:(DE-Juel1)IEK-4-20101013
|k IEK-4
|l Plasmaphysik
|x 0
920 1 _ |0 I:(DE-Juel1)INM-1-20090406
|k INM-1
|l Strukturelle und funktionelle Organisation des Gehirns
|x 1
920 1 _ |0 I:(DE-Juel1)INM-2-20090406
|k INM-2
|l Molekulare Organisation des Gehirns
|x 2
980 _ _ |a journal
980 _ _ |a VDB
980 _ _ |a I:(DE-Juel1)IEK-4-20101013
980 _ _ |a I:(DE-Juel1)INM-1-20090406
980 _ _ |a I:(DE-Juel1)INM-2-20090406
980 _ _ |a UNRESTRICTED
981 _ _ |a I:(DE-Juel1)IFN-1-20101013

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