TY  - JOUR
AU  - Kireev, Dmitry
AU  - Shokoohimehr, Pegah
AU  - Ernst, Mathis
AU  - Montes, Viviana Rincón
AU  - Srikantharajah, Kagithiri
AU  - Maybeck, Vanessa
AU  - Wolfrum, Bernhard
AU  - Offenhäusser, Andreas
TI  - Fabrication of ultrathin and flexible graphene-based devices for in vivo neuroprosthetics
JO  - MRS advances
VL  - 3
IS  - 29
SN  - 2059-8521
CY  - Cambridge
PB  - Cambridge University Press
M1  - FZJ-2018-07164
SP  - 1621 - 1627
PY  - 2018
AB  - Graphene based devices have already proven to be extremely sensitive and very useful in a wide spectrum of bioelectronics research. In the manuscript we describe a method to fabricate arrays of graphene-based probes, requiring minimal number of fabrication steps, while maintaining overall device functionality. These polyimide-based probes are approximately 6 µm thick, therefore ultraflexible, yet robust and stable. Devices, such as graphene field effect transistors (GFETs) and graphene multielectrode arrays (GMEAs) have been designed, fabricated and tested for their performance. The flexible GFETs exhibit sensitivity, i.e. transconductance up to 700 µS/V, which an order of magnitude larger compared to typical silicon transistors. Multiple probe per wafer design allows us to fabricate different kinds of devices on one 4-inch wafer, consequently increasing a possible range of applications from e.g. retinal to cortical neuroprosthetics
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000432997200002
DO  - DOI:10.1557/adv.2018.94
UR  - https://juser.fz-juelich.de/record/858269
ER  -