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@ARTICLE{Kireev:858269,
author = {Kireev, Dmitry and Shokoohimehr, Pegah and Ernst, Mathis
and Montes, Viviana Rincón and Srikantharajah, Kagithiri
and Maybeck, Vanessa and Wolfrum, Bernhard and
Offenhäusser, Andreas},
title = {{F}abrication of ultrathin and flexible graphene-based
devices for in vivo neuroprosthetics},
journal = {MRS advances},
volume = {3},
number = {29},
issn = {2059-8521},
address = {Cambridge},
publisher = {Cambridge University Press},
reportid = {FZJ-2018-07164},
pages = {1621 - 1627},
year = {2018},
abstract = {Graphene based devices have already proven to be extremely
sensitive and very useful in a wide spectrum of
bioelectronics research. In the manuscript we describe a
method to fabricate arrays of graphene-based probes,
requiring minimal number of fabrication steps, while
maintaining overall device functionality. These
polyimide-based probes are approximately 6 µm thick,
therefore ultraflexible, yet robust and stable. Devices,
such as graphene field effect transistors (GFETs) and
graphene multielectrode arrays (GMEAs) have been designed,
fabricated and tested for their performance. The flexible
GFETs exhibit sensitivity, i.e. transconductance up to 700
µS/V, which an order of magnitude larger compared to
typical silicon transistors. Multiple probe per wafer design
allows us to fabricate different kinds of devices on one
4-inch wafer, consequently increasing a possible range of
applications from e.g. retinal to cortical neuroprosthetics},
cin = {ICS-8},
ddc = {670},
cid = {I:(DE-Juel1)ICS-8-20110106},
pnm = {552 - Engineering Cell Function (POF3-552)},
pid = {G:(DE-HGF)POF3-552},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000432997200002},
doi = {10.1557/adv.2018.94},
url = {https://juser.fz-juelich.de/record/858269},
}