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@INPROCEEDINGS{Han:859061,
author = {Han, Qinghua and Tromm, Thomas Carl Ulrich and Schubert,
Jürgen and Mantl, Siegfried and Zhao, Qing-Tai},
title = {{S}teep slope negative capacitance {FDSOI} {MOSFET}s with
ferroelectric {H}f{YO}x},
address = {Piscataway, NJ},
publisher = {IEEE},
reportid = {FZJ-2019-00012},
isbn = {978-1-5386-4811-7},
pages = {1-3},
year = {2018},
abstract = {Steep slope negative capacitance MOSFETs with HfYOx
ferroelectric on FDSOI were experimentally demonstrated. An
average SS of 30 mV/dec was achieved over 3 decades of drain
current. We found that the subthermal SS degrades with the
sweeping numbers, which is assumed to be caused by the traps
in the ferroelectric oxide layer.},
month = {Mar},
date = {2018-03-19},
organization = {2018 Joint International EUROSOI
Workshop and International Conference
on Ultimate Integration on Silicon
(EUROSOI-ULIS), Granada (Spain), 19 Mar
2018 - 21 Mar 2018},
cin = {PGI-9},
cid = {I:(DE-Juel1)PGI-9-20110106},
pnm = {521 - Controlling Electron Charge-Based Phenomena
(POF3-521)},
pid = {G:(DE-HGF)POF3-521},
typ = {PUB:(DE-HGF)8 / PUB:(DE-HGF)7},
doi = {10.1109/ULIS.2018.8354733},
url = {https://juser.fz-juelich.de/record/859061},
}