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@INPROCEEDINGS{Buca:859063,
author = {Buca, D. and Schulte-Braucks, C. and von den Driesch, N.
and Tiedemann, Andreas and Breuer, Uwe and Hartmann, J. M.
and Zaumseil, P. and Mantl, S. and Zhao, Q. T.},
title = {{G}ate stack and {N}i({S}i{G}e{S}n) metal contacts
formation on low bandgap strained ({S}i){G}e({S}n)
semiconductors},
publisher = {IEEE},
reportid = {FZJ-2019-00014},
pages = {1-4},
year = {2018},
comment = {2018 18th International Workshop on Junction Technology
(IWJT) : [Proceedings] - IEEE, 2018. - ISBN
978-1-5386-4511-6978-1-5386-4513-0 -
doi:10.1109/IWJT.2018.8330309},
booktitle = {2018 18th International Workshop on
Junction Technology (IWJT) :
[Proceedings] - IEEE, 2018. - ISBN
978-1-5386-4511-6978-1-5386-4513-0 -
doi:10.1109/IWJT.2018.8330309},
abstract = {GeSn is a promising material to make the most of two worlds
[1]: (i) its direct bandgap for high Sn contents yields
high-mobility and decent optical properties; (ii) as a CMOS
compatible material, it benefits from the maturity of group
IV semiconductor ultra-large scale integration. However the
benefit of high carrier mobility in MOSFETs or direct
bandgap in tunnel-FETs can only be used in combination with
a high quality, scaled and low defective gate oxide and
metallic contacts. In this work, we report on (i) the
fabrication and characterization of MOS capacitors on
high-Sn-content direct bandgap GeSn alloys and (ii) the
formation of metallic contacts with low resistivity. We will
also briefly discuss the Schottky barrier tuning by dopant
segregation during Ni-stano-germanidation.},
month = {Mar},
date = {2018-03-08},
organization = {2018 18th International Workshop on
Junction Technology (IWJT), Shanghai
(China), 8 Mar 2018 - 9 Mar 2018},
cin = {PGI-9 / JARA-FIT},
cid = {I:(DE-Juel1)PGI-9-20110106 / $I:(DE-82)080009_20140620$},
pnm = {521 - Controlling Electron Charge-Based Phenomena
(POF3-521)},
pid = {G:(DE-HGF)POF3-521},
typ = {PUB:(DE-HGF)8 / PUB:(DE-HGF)7},
doi = {10.1109/IWJT.2018.8330309},
url = {https://juser.fz-juelich.de/record/859063},
}