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@ARTICLE{Meng:859080,
author = {Meng, Xiao-Ran and Ping, Yun-Xia and Yu, Wen-Jie and Xue,
Zhong-Ying and Wei, Xing and Zhang, Miao and Di, Zeng-Feng
and Zhang, Bo},
collaboration = {Zhao, Qing-Tai},
title = {{I}mpact of {A}l addition on the formation of {N}i
germanosilicide layers under different temperature annealing
*},
journal = {Chinese physics / B B},
volume = {26},
number = {9},
issn = {1674-1056},
address = {London},
publisher = {Inst. of Physics},
reportid = {FZJ-2019-00031},
pages = {098503 -},
year = {2017},
abstract = {Solid reactions between Ni and relaxed Si0.7Ge0.3 substrate
were systematically investigated with different Al
interlayer thicknesses. The morphology, composition, and
micro-structure of the Ni germanosilicide layers were
analyzed with different annealing temperatures in the
appearance of Al. The germanosilicide layers were
characterized by Rutherford backscattering spectrometry,
cross-section transmission electron microscopy, scan
transmission electron microscopy, and secondary ion mass
spectroscopy. It was shown that the incorporation of Al
improved the surface and interface morphology of the
germanosilicide layers, enhanced the thermal stabilities,
and retarded the Ni-rich germanosilicide phase to mono
germanosilicide phase. With increasing annealing
temperature, Al atoms distributed from the Ni/Si0.7Ge0.3
interface to the total layer of Ni2Si0.7Ge0.3, and finally
accumulated at the surface of NiSi0.7Ge0.3. We found that
under the assistance of Al atoms, the best quality Ni
germanosilicide layer was achieved by annealing at 700 °C
in the case of 3 nm Al.},
cin = {PGI-9},
ddc = {530},
cid = {I:(DE-Juel1)PGI-9-20110106},
pnm = {521 - Controlling Electron Charge-Based Phenomena
(POF3-521)},
pid = {G:(DE-HGF)POF3-521},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000409485800003},
doi = {10.1088/1674-1056/26/9/098503},
url = {https://juser.fz-juelich.de/record/859080},
}