%0 Conference Paper
%A Han, Qinghua
%A Tromm, Thomas Carl Ulrich
%A Aleksa, Paulus
%A Schubert, Jürgen
%A Mantl, Siegfried
%A Zhao, Qing-Tai
%T Impact of Traps in Ferroelectric HfYOx on Negative Capacitance MOSFETs
%M FZJ-2019-00047
%D 2018
%Z Extended Abstract
%B 2018 IEEE Silicon Nanoelectronics Workshop
%C 17 Jun 2018 - 18 Jun 2018, Honolulu (USA)
Y2 17 Jun 2018 - 18 Jun 2018
M2 Honolulu, USA
%F PUB:(DE-HGF)6
%9 Conference Presentation
%U https://juser.fz-juelich.de/record/859103