%0 Journal Article
%T Nanomanufacturing and metrology
%C [Singapore]
%I Springer Singapore
%D 2017
%Z Automatically generated record. (Updated: 2024-12-20)
%K Mechanical Engineering (ASJC)
%K Materials Science (miscellaneous) (ASJC)
%K Industrial and Manufacturing Engineering (ASJC)
%U https://juser.fz-juelich.de/record/859371