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000859371 2100_ $$2iso$$aNanomanuf Metrol
000859371 2100_ $$2dnlm$$aNanomanuf Metrol
000859371 2100_ $$2iso$$aNanomanuf Metrol
000859371 24220 $$2DE-600$$aNanomanufacturing and metrology$$yen
000859371 24220 $$2DE-600$$aNanomanufacturing and metrology
000859371 245__ $$2DE-600$$aNanomanufacturing and metrology$$hprint, online
000859371 2463_ $$2DE-600$$aNanomanufacturing and metrology
000859371 2463_ $$aNanomanufacturing and metrology
000859371 260__ $$a[Singapore]$$bSpringer Singapore$$c[2017]-
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000859371 26431 $$a[Singapore]$$bSpringer Singapore$$c[2017]-
000859371 3620_ $$2DE-600$$aNovember 2017-
000859371 36301 $$2DE-600$$81.1\x$$i2017$$j11
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000859371 650_7 $$0ASJC:2210$$2ASJC$$aMechanical Engineering
000859371 650_7 $$0ASJC:2501$$2ASJC$$aMaterials Science (miscellaneous)
000859371 650_7 $$0ASJC:2209$$2ASJC$$aIndustrial and Manufacturing Engineering
000859371 65310 $$2EZB-Subject$$aMaschinenbau
000859371 65310 $$2EZB-Keyword$$aNanotechnologie
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000859371 8564_ $$d0$$uhttps://link.springer.com/journal/41871$$yVerlag; 6 (2023)- = kostenfrei
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000859371 8801_ $$2DE-600$$aNanomanufacturing and metrology
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