TY  - JOUR
TI  - Nanomanufacturing and metrology
CY  - [Singapore]
PB  - Springer Singapore
PY  - 2017
N1  - Automatically generated record. (Updated: 2024-12-20)
KW  - Mechanical Engineering (ASJC)
KW  - Materials Science (miscellaneous) (ASJC)
KW  - Industrial and Manufacturing Engineering (ASJC)
UR  - https://juser.fz-juelich.de/record/859371
ER  -