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@INPROCEEDINGS{Lobe:860158,
      author       = {Lobe, Sandra and Dellen, Christian and Windmüller, Anna
                      and Tsai, Chih-Long and Möller, Sören and Sohn, Yoo Jung
                      and Sebold, Doris and Finsterbusch, Martin and
                      Fattakhova-Rohlfing, Dina and Uhlenbruck, Sven and Guillon,
                      Olivier},
      title        = {{T}hin film electrolytes for all-solid-state lithium
                      batteries by sputter deposition},
      reportid     = {FZJ-2019-00944},
      year         = {2018},
      abstract     = {All-solid-state lithium batteries can outperform the energy
                      densities of state-of-the-art Li-ion batteries with liquid
                      electrolyte if the electrolyte is applied as a thin film.
                      Promising electrolyte materials are garnet-structured oxides
                      like Li7La3Zr2O12 due to their high ionic conductivity and
                      their high chemical and electrochemical stability with
                      lithium metal anodes as well as different cathode materials.
                      Considerations about thermodynamic stabilities play an
                      important role during ceramic processing and thin film
                      manufacturing. Most cathode materials react at comparatively
                      low temperature (<600°C-700°C) with garnet materials.
                      Thus, this critical temperature must not be exceeded during
                      deposition. Furthermore, diffusion of elements from the
                      substrate into the thin film and vice versa has to be
                      avoided. Therefore, garnet thin films were already
                      synthesized by different groups with different wet-chemical
                      as well as chemical and physical vapor deposition methods.
                      Nevertheless, complete thin film batteries with garnet
                      electrolyte were not realized yet. In this presentation we
                      show how material optimization and thin film processing of
                      garnet materials can alleviate the problems concerning the
                      high reactivity of the components. All thin films were made
                      by radio frequency sputter deposition. An important key
                      parameter is the substrate temperature during the deposition
                      process which has to be adjusted carefully in order to
                      optimize the electrochemical properties of the deposited
                      thin films on a particular substrate. The Li-ion
                      conductivity of the thin films is highly influenced by the
                      microstructure and thus by the growth mechanism of the thin
                      film. Therefore, the substrate temperature has to be high
                      enough to achieve a proper crystallinity. On the other hand,
                      a lower deposition temperature leads to less chemical
                      reaction and interdiffusion. Post-annealing approaches in
                      order to circumvent this dilemma will be presented, too. The
                      deposited electrolyte thin films and half cells are analyzed
                      with regard to structural and morphological properties,
                      chemical composition and element distribution, and finally
                      their electrochemical behavior.},
      month         = {Apr},
      date          = {2018-04-10},
      organization  = {Kraftwerk Batterie, Münster
                       (Germany), 10 Apr 2018 - 11 Apr 2018},
      subtyp        = {After Call},
      cin          = {IEK-1},
      cid          = {I:(DE-Juel1)IEK-1-20101013},
      pnm          = {131 - Electrochemical Storage (POF3-131)},
      pid          = {G:(DE-HGF)POF3-131},
      typ          = {PUB:(DE-HGF)24},
      url          = {https://juser.fz-juelich.de/record/860158},
}