%0 Journal Article %A Gleich, Stephan %A Soler, Rafael %A Fager, Hanna %A Bolvardi, Hamid %A Achenbach, Jan-Ole %A Hans, Marcus %A Primetzhofer, Daniel %A Schneider, Jochen M. %A Dehm, Gerhard %A Scheu, Christina %T Modifying the nanostructure and the mechanical properties of Mo 2 BC hard coatings: Influence of substrate temperature during magnetron sputtering %J Materials and design %V 142 %@ 0264-1275 %C Amsterdam [u.a.] %I Elsevier Science %M FZJ-2019-01890 %P 203 - 211 %D 2018 %F PUB:(DE-HGF)16 %9 Journal Article %R 10.1016/j.matdes.2018.01.029 %U https://juser.fz-juelich.de/record/861412