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@TECHREPORT{Vassen:861517,
      author       = {Vassen, Robert and Hathiramani, Dag and Stöver, Detlev},
      title        = {{V}erfahren zur {H}erstellung dünner, dichter
                      {K}eramikschichten},
      reportid     = {FZJ-2019-01975},
      year         = {2012},
      cin          = {IEK-1},
      cid          = {I:(DE-Juel1)IEK-1-20101013},
      pnm          = {113 - Methods and Concepts for Material Development
                      (POF3-113)},
      pid          = {G:(DE-HGF)POF3-113},
      typ          = {PUB:(DE-HGF)23},
      url          = {https://juser.fz-juelich.de/record/861517},
}