000861521 001__ 861521 000861521 005__ 20240708132728.0 000861521 013__ $$aPt1.2663 000861521 0247_ $$2Patent$$aDE102014011552A1 000861521 037__ $$aFZJ-2019-01979 000861521 1001_ $$0P:(DE-Juel1)156157$$aZhang, Yanli$$b0$$eCorresponding author 000861521 245__ $$aSensoren sowie Verfahren zur Herstellung von Sensoren 000861521 260__ $$c2016 000861521 3367_ $$2ORCID$$aPATENT 000861521 3367_ $$0PUB:(DE-HGF)23$$2PUB:(DE-HGF)$$aPatent$$bpatent$$mpatent$$s1557162451_5875 000861521 3367_ $$2DRIVER$$apatent 000861521 3367_ $$2BibTeX$$aTECHREPORT 000861521 3367_ $$015$$2EndNote$$aPatent 000861521 3367_ $$2DataCite$$aPatent 000861521 536__ $$0G:(DE-HGF)POF3-113$$a113 - Methods and Concepts for Material Development (POF3-113)$$cPOF3-113$$fPOF III$$x0 000861521 7001_ $$0P:(DE-Juel1)129670$$aVassen, Robert$$b1 000861521 7001_ $$0P:(DE-Juel1)129630$$aMack, Daniel Emil$$b2 000861521 7001_ $$0P:(DE-Juel1)129633$$aMauer, Georg$$b3 000861521 909CO $$ooai:juser.fz-juelich.de:861521$$pVDB 000861521 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)129670$$aForschungszentrum Jülich$$b1$$kFZJ 000861521 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)129630$$aForschungszentrum Jülich$$b2$$kFZJ 000861521 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)129633$$aForschungszentrum Jülich$$b3$$kFZJ 000861521 9131_ $$0G:(DE-HGF)POF3-113$$1G:(DE-HGF)POF3-110$$2G:(DE-HGF)POF3-100$$3G:(DE-HGF)POF3$$4G:(DE-HGF)POF$$aDE-HGF$$bEnergie$$lEnergieeffizienz, Materialien und Ressourcen$$vMethods and Concepts for Material Development$$x0 000861521 9201_ $$0I:(DE-Juel1)IEK-1-20101013$$kIEK-1$$lWerkstoffsynthese und Herstellungsverfahren$$x0 000861521 980__ $$apatent 000861521 980__ $$aVDB 000861521 980__ $$aI:(DE-Juel1)IEK-1-20101013 000861521 980__ $$aUNRESTRICTED 000861521 981__ $$aI:(DE-Juel1)IMD-2-20101013