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@MASTERSTHESIS{Shihada:862360,
      author       = {Shihada, Jamal},
      title        = {{S}tealth {N}anocavity {MEA}s for {P}atch-{C}lamp like
                      {G}igaohm {S}ealing},
      school       = {RWTH Aachen University},
      type         = {Masterarbeit},
      reportid     = {FZJ-2019-02694},
      pages        = {82},
      year         = {2019},
      note         = {Masterarbeit, RWTH Aachen University, 2019},
      cin          = {ICS-8},
      cid          = {I:(DE-Juel1)ICS-8-20110106},
      pnm          = {552 - Engineering Cell Function (POF3-552)},
      pid          = {G:(DE-HGF)POF3-552},
      typ          = {PUB:(DE-HGF)19},
      url          = {https://juser.fz-juelich.de/record/862360},
}