%0 Journal Article
%A Tryus, Maksym
%A Nikolaev, Konstantin V.
%A Makhotkin, Igor A.
%A Schubert, Jürgen
%A Kibkalo, Lidia
%A Danylyuk, Serhiy
%A Giglia, Angelo
%A Nicolosi, Piergiorgio
%A Juschkin, Larissa
%T Optical and structural characterization of orthorhombic LaLuO3 using extreme ultraviolet reflectometry
%J Thin solid films
%V 680
%@ 0040-6090
%C Amsterdam [u.a.]
%I Elsevier
%M FZJ-2019-02846
%P 94 - 101
%D 2019
%X A thin orthorhombic LaLuO film, grown on SrTiO substrate by pulsed laser deposition, is characterized using multi-angle spectralextreme ultraviolet reflectometry (EUVR). Layer structure parameters and optical constants of LaLuO are determined simultaneously byfitting angular reflectivity curves in a wide spectral range (70–200 eV). From near-edge optical constant analysis, La:Lu stoichiometryratio and the film density are derived. Sample structure is additionally analyzed using XRR, AFM and TEM methods. EUVR as a methodof structural characterization is discussed in comparison with XRR. Correlation error analysis of the layer structure parameters,obtained from independent EUVR and XRR fits, is presented.
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:000467389900015
%R 10.1016/j.tsf.2019.04.037
%U https://juser.fz-juelich.de/record/862552