TY  - JOUR
AU  - Tryus, Maksym
AU  - Nikolaev, Konstantin V.
AU  - Makhotkin, Igor A.
AU  - Schubert, Jürgen
AU  - Kibkalo, Lidia
AU  - Danylyuk, Serhiy
AU  - Giglia, Angelo
AU  - Nicolosi, Piergiorgio
AU  - Juschkin, Larissa
TI  - Optical and structural characterization of orthorhombic LaLuO3 using extreme ultraviolet reflectometry
JO  - Thin solid films
VL  - 680
SN  - 0040-6090
CY  - Amsterdam [u.a.]
PB  - Elsevier
M1  - FZJ-2019-02846
SP  - 94 - 101
PY  - 2019
AB  - A thin orthorhombic LaLuO film, grown on SrTiO substrate by pulsed laser deposition, is characterized using multi-angle spectralextreme ultraviolet reflectometry (EUVR). Layer structure parameters and optical constants of LaLuO are determined simultaneously byfitting angular reflectivity curves in a wide spectral range (70–200 eV). From near-edge optical constant analysis, La:Lu stoichiometryratio and the film density are derived. Sample structure is additionally analyzed using XRR, AFM and TEM methods. EUVR as a methodof structural characterization is discussed in comparison with XRR. Correlation error analysis of the layer structure parameters,obtained from independent EUVR and XRR fits, is presented.
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000467389900015
DO  - DOI:10.1016/j.tsf.2019.04.037
UR  - https://juser.fz-juelich.de/record/862552
ER  -